-
公开(公告)号：US08947772B2
公开(公告)日：2015-02-03
申请号：US14198335
申请日：2014-03-05
Applicant: Moxtek, Inc.
Inventor： Eric Gardner , Bin Wang , Mark Davis , John D. Dredge, Jr.
IPC: G02B5/30
CPC classification number: G02B5/3075 , G02B5/3058 , G02B5/3091
Abstract: An inorganic, dielectric grid polarizer device includes a stack of film layers disposed over a substrate. Each film layer is formed of a material that is both inorganic and dielectric. Adjacent film layers each have different refractive indices. At least one of the film layers is discontinuous to form a form-birefringent layer with an array of parallel ribs having a period less than 400 nm. Another layer, different than the form-birefringent layer, is formed of an optically absorptive material for the ultra-violet spectrum.
Abstract translation: 无机介电栅极偏振器装置包括设置在基板上方的一层薄膜层。 每个膜层由无机和电介质的材料形成。 相邻的膜层各自具有不同的折射率。 至少一个膜层是不连续的，以形成具有周期小于400nm的平行肋排列的双折射层。 与形成双折射层不同的另一层由用于紫外光谱的光学吸收材料形成。
-
公开(公告)号：US10114161B2
公开(公告)日：2018-10-30
申请号：US15248846
申请日：2016-08-26
Applicant: Moxtek, Inc.
Inventor： Bin Wang , Mark Davis
Abstract: A wire grid polarizer comprising on array of parallel, elongated first rib groups disposed over a substrate. Each first rib group can comprise a central first transmissive rib and a pair of first wires including a first wire disposed along each side of the first transmissive rib. A first dielectric material can substantially fill first gaps between each rib group and an adjacent rib group. An array of parallel, elongated second wires can be disposed over the rib groups and the first dielectric material. The first wires or the second wires can be absorptive and the other of the first wires or the second wires can be reflective.
-
Patent Agency Ranking
公开(公告)号：US09523805B2
公开(公告)日：2016-12-20
申请号：US14035478
申请日：2013-09-24
Applicant: Moxtek, Inc.
Inventor： Mark Davis
CPC classification number: G02B5/3058 , B82Y20/00 , Y10T428/2457
Abstract: A wire grid polarizer can have a repeated pattern of groups of parallel elongated wires disposed over a substrate. Each group of wires can comprise at least three wires. At least one wire at an interior of each group can be taller than outermost wires of each group. The wires can be a byproduct of an etch reaction.
Abstract translation: 线栅偏振器可以具有布置在衬底上的平行细长线组的重复图案。 每组电线可以包括至少三条电线。 每个组内部的至少一根线可以比每组的最外面的电线高。 电线可以是蚀刻反应的副产物。
-
公开(公告)号：US20150077851A1
公开(公告)日：2015-03-19
申请号：US14314814
申请日：2014-06-25
Applicant: Moxtek, Inc.
Inventor： Bin Wang , Mark Davis
IPC: G02B5/30
CPC classification number: G02B5/3058 , G02B5/22 , G02B5/3075
Abstract: A wire grid polarizer comprising an array of parallel, elongated first rib groups disposed over a substrate. Each first rib group can comprise a central first transmissive rib and a pair of first wires including a first wire disposed along each side of the first transmissive rib. A first dielectric material can substantially fill first gaps between each rib group and an adjacent rib group. An array of parallel, elongated second wires can be disposed over the rib groups and the first dielectric material. The first wires or the second wires can be absorptive and the other of the first wires or the second wires can be reflective.
Abstract translation: 一种线栅偏振器，包括设置在衬底上的平行的，细长的第一肋组的阵列。 每个第一肋组可以包括中心第一透射肋和一对第一导线，其包括沿着第一透射肋的每一侧布置的第一线。 第一介电材料可以基本上填充每个肋组和相邻肋组之间的第一间隙。 平行的，细长的第二导线的阵列可以布置在肋组和第一介电材料之上。 第一线或第二线可以是吸收性的，并且第一线或第二线中的另一条可以是反射的。
-
公开(公告)号：US20140313571A1
公开(公告)日：2014-10-23
申请号：US14198335
申请日：2014-03-05
Applicant: Moxtek, Inc.
Inventor： Eric Gardner , Bin Wang , Mark Davis , John D. Dredge, JR.
IPC: G02B5/30
CPC classification number: G02B5/3075 , G02B5/3058 , G02B5/3091
Abstract: An inorganic, dielectric grid polarizer device includes a stack of film layers disposed over a substrate. Each film layer is formed of a material that is both inorganic and dielectric. Adjacent film layers each have different refractive indices. At least one of the film layers is discontinuous to form a form-birefringent layer with an array of parallel ribs having a period less than 400 nm. Another layer, different than the form-birefringent layer, is formed of an optically absorptive material for the ultra-violet spectrum.
Abstract translation: 无机介电栅极偏振器装置包括设置在基板上方的一层薄膜层。 每个膜层由无机和电介质的材料形成。 相邻的膜层各自具有不同的折射率。 至少一个膜层是不连续的，以形成具有周期小于400nm的平行肋排列的双折射层。 与形成双折射层不同的另一层由用于紫外光谱的光学吸收材料形成。
-
公开(公告)号：US20160363706A1
公开(公告)日：2016-12-15
申请号：US15248846
申请日：2016-08-26
Applicant: Moxtek, Inc.
Inventor： Bin Wang , Mark Davis
CPC classification number: G02B5/3058 , G02B5/22 , G02B5/3075
Abstract: A wire grid polarizer comprising on array of parallel, elongated first rib groups disposed over a substrate. Each first rib group can comprise a central first transmissive rib and a pair of first wires including a first wire disposed along each side of the first transmisslve rib. A first dielectric material can substantially fill first gaps between each rib group and an adjacent rib group. An array of parallel, elongated second wires can be disposed over the rib groups and the first dielectric material. The first wires or the second wires can be absorptive and the other of the first wires or the second wires can be reflective.
Abstract translation: 一种线栅偏振器，包括设置在衬底上的平行的，细长的第一肋组的阵列。 每个第一肋组可以包括中心第一透射肋和一对第一导线，其包括沿着第一透射肋的每一侧布置的第一线。 第一介电材料可以基本上填充每个肋组和相邻肋组之间的第一间隙。 平行的，细长的第二导线的阵列可以布置在肋组和第一介电材料之上。 第一线或第二线可以是吸收性的，并且第一线或第二线中的另一条可以是反射的。
-
公开(公告)号：US20140016197A1
公开(公告)日：2014-01-16
申请号：US14035478
申请日：2013-09-24
Applicant: Moxtek, Inc.
Inventor： Mark Davis
IPC: G02B5/30
CPC classification number: G02B5/3058 , B82Y20/00 , Y10T428/2457
Abstract: A wire grid polarizer can have a repeated pattern of groups of parallel elongated wires disposed over a substrate. Each group of wires can comprise at least three wires. At least one wire at an interior of each group can be taller than outermost wires of each group. The wires can be a byproduct of an etch reaction.
Abstract translation: 线栅偏振器可以具有布置在衬底上的平行细长线组的重复图案。 每组电线可以包括至少三条电线。 每个组内部的至少一根线可以比每组的最外面的电线高。 电线可以是蚀刻反应的副产物。
-
-
-
-
-
-
Search Results
7
records
(took 0.016 seconds)
