公开(公告)号：US20140313571A1

公开(公告)日：2014-10-23

申请号：US14198335

申请日：2014-03-05

Applicant: Moxtek, Inc.

Inventor： Eric Gardner ,  Bin Wang ,  Mark Davis ,  John D. Dredge, JR.

IPC: G02B5/30

CPC classification number: G02B5/3075 ,  G02B5/3058 ,  G02B5/3091

Abstract: An inorganic, dielectric grid polarizer device includes a stack of film layers disposed over a substrate. Each film layer is formed of a material that is both inorganic and dielectric. Adjacent film layers each have different refractive indices. At least one of the film layers is discontinuous to form a form-birefringent layer with an array of parallel ribs having a period less than 400 nm. Another layer, different than the form-birefringent layer, is formed of an optically absorptive material for the ultra-violet spectrum.

Abstract translation: 无机介电栅极偏振器装置包括设置在基板上方的一层薄膜层。 每个膜层由无机和电介质的材料形成。 相邻的膜层各自具有不同的折射率。 至少一个膜层是不连续的，以形成具有周期小于400nm的平行肋排列的双折射层。 与形成双折射层不同的另一层由用于紫外光谱的光学吸收材料形成。