公开(公告)号：US20160069927A1

公开(公告)日：2016-03-10

申请号：US14944454

申请日：2015-11-18

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Hiroshi HAMAMURA

IPC: G01P15/12

CPC classification number: G01P15/123 ,  G01P21/00

Abstract: An acceleration sensor includes a fixing portion, a weight portion, a detection beam, support beams, and a metal wiring. The weight portion is supported on the fixing portion so as to be freely displaced. The detection beam is connected to the fixing portion and the weight portion and piezoresistive elements are provided on the detection beam. The support beams are provided separately from the detection beam and are connected to the fixing portion and the weight portion. Both ends of the metal wiring are extended to the fixing portion and the metal wiring is wired so as to pass through the support beams.

Abstract translation: 加速度传感器包括固定部分，重量部分，检测梁，支撑梁和金属布线。 重物部分被支撑在固定部分上以便自由移位。 检测光束连接到固定部分，重量部分和压阻元件设置在检测光束上。 支撑梁与检测梁分开设置并连接到固定部分和重物部分。 金属布线的两端延伸到固定部分，并且金属布线被布线以便穿过支撑梁。

公开(公告)号：US20140000368A1

公开(公告)日：2014-01-02

申请号：US13714498

申请日：2012-12-14

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Kazuhiro YOSHIDA ,  Hiroshi HAMAMURA

IPC: G01P15/12

CPC classification number: G01P15/123 ,  B81B3/0021 ,  B81B2201/0235 ,  G01P15/09

Abstract: A dynamic sensor includes a weight having an H shape in a plan view. The weight includes a first weight portion and a second weight portion which have substantially rectangular parallelepiped shapes and are aligned in a short side direction at an interval and a bridge portion which connects the first and second weight portions and extends in the aligned direction. The bridge portion connects the first and second weight portions at an approximate center thereof in a long side direction. Supports are located in a region between the first and second weight portions where the bridge portion is not provided. The first weight portion is connected to a first support via a first beam and to a second support via a second beam. The second weight portion is connected to the first support via a third beam and to the second support via a fourth beam.

Abstract translation: 动态传感器包括在平面图中具有H形的重物。 该重量包括第一重量部分和第二重量部分，其具有基本上长方体形状并且沿短边方向以一定间隔对准，桥接部分连接第一和第二配重部分并沿着排列方向延伸。 桥接部分在第一和第二配重部分的大致中心处沿着长边方向连接。 支撑件位于不设置桥接部的第一和第二配重部分之间的区域中。 第一配重部分经由第一梁连接到第一支撑件，经由第二梁连接到第二支撑件。 第二配重部分经由第三梁连接到第一支撑件，经由第四梁连接到第二支撑件。

公开(公告)号：US20180074091A1

公开(公告)日：2018-03-15

申请号：US15691790

申请日：2017-08-31

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Ryunosuke HINO ,  Hiroshi HAMAMURA

IPC: G01P15/12 ,  G01C19/56 ,  H01L29/84 ,  H01L29/167 ,  H01L29/36

CPC classification number: G01P15/123 ,  G01C19/56 ,  H01L29/167 ,  H01L29/36 ,  H01L29/84

Abstract: A piezoresistive sensor includes a first detection beam including a first piezoresistor and a first base in which the first piezoresistor is embedded. The first base includes a depletion layer that surrounds the first piezoresistor, a first region made of a semiconductor having a polarity different from a polarity of the first piezoresistor, and second regions each made of a semiconductor having a polarity different from the polarity of the first piezoresistor and an impurity concentration higher than an impurity concentration of the first region. Each second region is exposed from a corresponding one of side surfaces of the first detection beam. The depletion layer is surrounded by a region defined by the first region and the second regions. Other detection beams have the same structure.

公开(公告)号：US20150331010A1

公开(公告)日：2015-11-19

申请号：US14813329

申请日：2015-07-30

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Hiroshi HAMAMURA

IPC: G01P15/12

CPC classification number: G01P15/123 ,  B81B3/00 ,  G01P15/12 ,  G01P15/18 ,  H01L29/84

Abstract: An acceleration sensor includes weights, a support, and beams on which piezoresistive elements are disposed. The weights include projections and recesses. The support includes projections and recesses. The beams are connected to the projections and the recesses. The beams are connected to the recesses and the projections. The beams are connected to the recesses and the projections.

Abstract translation: 加速度传感器包括重量，支撑件和压阻元件设置在其上的梁。 重量包括突起和凹槽。 支撑件包括凸起和凹槽。 梁连接到突起和凹槽。 梁连接到凹槽和突起。 梁连接到凹槽和突起。

公开(公告)号：US20140283606A1

公开(公告)日：2014-09-25

申请号：US14301360

申请日：2014-06-11

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Hiroshi HAMAMURA

IPC: G01P15/12

CPC classification number: G01P15/123 ,  G01P15/18

Abstract: An acceleration sensor includes a weight, a supporting portion arranged so as to face the weight, beams configured to be flexible and connect the weight and the supporting portion, and piezoresistive elements disposed at the beams, wherein the weight oscillates in a pendulum motion while using center portions of the beams as fulcrums.

Abstract translation: 一个加速度传感器包括一个配重，一个配置成面对重物的支撑部分，被配置为柔性的梁和连接重物和支撑部分的梁和设置在梁处的压阻元件，其中重量以摆锤运动振荡，同时使用 梁的中心部分作为支点。