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公开(公告)号：US20220033954A1
公开(公告)日：2022-02-03
申请号：US17094754
申请日：2020-11-10
发明人： Cheng-Sheng Huang , Chi-Yung Hsieh , Yu-Chi Lin , Chih-Chung Wu , Chi-Fang Huang
摘要： A method of fabricating a thin film with a varying thickness includes the steps of providing a shadow mask with an opening, providing a carrier plate, arranging a substrate on the carrier plate, and coating the substrate through the opening whilst rotating the carrier plate relative to the shadow mask. A plurality of zones of the substrates is swept and exposed from arcuate portions of the opening per each turn by a plurality of predetermined exposure times, respectively. The varying thickness of the thin film corresponds to variation of the predetermined exposure times.
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公开(公告)号：US11499937B2
公开(公告)日：2022-11-15
申请号：US16515206
申请日：2019-07-18
发明人： Hsiao-Wen Zan , Hsin-Fei Meng , Yu-Chi Lin , Shang-Yu Yu , Ting-Wei Tung , Yi-Chu Wu , Yu-Nung Mao
IPC分类号： G01N27/407 , G01N33/00 , G01N27/12
摘要： A gas sensor includes a first electrode, a gas detecting layer disposed on the first electrode, and an electric-conduction enhanced electrode unit being electrically connected to the first electrode and the gas detecting layer. The electric-conduction enhanced electrode unit includes an electric-conduction enhancing layer and a second electrode electrically connected to the electric-conduction enhancing layer. The electric-conduction enhancing layer is electrically connected to the gas detecting layer and is made of an electrically conductive organic material.
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公开(公告)号：US11499219B2
公开(公告)日：2022-11-15
申请号：US17094754
申请日：2020-11-10
发明人： Cheng-Sheng Huang , Chi-Yung Hsieh , Yu-Chi Lin , Chih-Chung Wu , Chi-Fang Huang
摘要： A method of fabricating a thin film with a varying thickness includes the steps of providing a shadow mask with an opening, providing a carrier plate, arranging a substrate on the carrier plate, and coating the substrate through the opening whilst rotating the carrier plate relative to the shadow mask. A plurality of zones of the substrates is swept and exposed from arcuate portions of the opening per each turn by a plurality of predetermined exposure times, respectively. The varying thickness of the thin film corresponds to variation of the predetermined exposure times.
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