Method of fabricating thin film with varying thickness

    公开(公告)号:US11499219B2

    公开(公告)日:2022-11-15

    申请号:US17094754

    申请日:2020-11-10

    IPC分类号: C23C14/04 G02B5/28

    摘要: A method of fabricating a thin film with a varying thickness includes the steps of providing a shadow mask with an opening, providing a carrier plate, arranging a substrate on the carrier plate, and coating the substrate through the opening whilst rotating the carrier plate relative to the shadow mask. A plurality of zones of the substrates is swept and exposed from arcuate portions of the opening per each turn by a plurality of predetermined exposure times, respectively. The varying thickness of the thin film corresponds to variation of the predetermined exposure times.

    Dispersive element and spectrometer using the same

    公开(公告)号:US10012535B2

    公开(公告)日:2018-07-03

    申请号:US14965695

    申请日:2015-12-10

    IPC分类号: G01J3/02 G01J3/18 G01J3/26

    摘要: A dispersive element is incorporated with an optical sensor as a spectrometer. The dispersive element includes a guided-mode resonance filter having a plurality of resonance regions. The resonance regions respectively have different filter characteristics, each reflecting a first light beam of a tested light source or transmitting a second light beam of the tested light source light source to the optical sensor, wherein the wavelength of the first light beam is different from that of the second light beam. In one embodiment, the dispersive element is incorporated with an optical sensor to form a miniature, high-resolution and low-cost spectrometer. The spectrometer makes use of the transmission efficiencies of the resonance regions of the guided-mode resonance filter and the light intensity distribution detected by the photosensitive regions of the optical sensor to acquire the spectral data of the tested light source.

    Pressure and shear force measurement device and method
    3.
    发明授权
    Pressure and shear force measurement device and method 有权
    压力和剪切力测量装置及方法

    公开(公告)号:US09109963B2

    公开(公告)日:2015-08-18

    申请号:US14090619

    申请日:2013-11-26

    摘要: A pressure and shear force measurement device and a pressure and shear force measurement method are disclosed. The measurement device includes a flexible substrate; a plurality of signal outputting units embedded in the flexible substrate for outputting signals; and a plurality of signal detectors disposed at a peripheral of the flexible substrate for receiving at least a signal outputted from the signal outputting units, wherein when the flexible substrate has a load applied thereon and each of the signal outputting units has a displacement, each of the signal detectors detects a pressure and a shear force resulting from the load on the flexible substrate based on the signal received from the signal outputting units.

    摘要翻译: 公开了压力和剪切力测量装置以及压力和剪切力测量方法。 测量装置包括柔性基板; 嵌入在柔性基板中用于输出信号的多个信号输出单元; 以及多个信号检测器,设置在柔性基板的周边,用于至少接收从信号输出单元输出的信号,其中当柔性基板具有施加的负载并且每个信号输出单元具有位移时, 信号检测器基于从信号输出单元接收的信号检测由柔性基板上的负载产生的压力和剪切力。

    Optical displacement sensing system

    公开(公告)号:US11480426B2

    公开(公告)日:2022-10-25

    申请号:US17240491

    申请日:2021-04-26

    摘要: An optical displacement sensing system is provided. With configuration of an optical sensor disposed on a displacement platform and in cooperation with a broadband light source and an optical spectrum analyzer, when the displacement platform moves, the waveguide grating of the optical sensor is resonated and the reflected light provided with a resonance wavelength is formed. The waveguide grating has the plurality of grating periods, and when the displacement platform moves to a different position to make the broadband light source correspond to a different grating period, the position can correspond to the different resonance wavelength. Therefore, according to the aforementioned configuration, the position is determined according to the different resonance wavelength, instead of using an optical encoder; furthermore, the micrometer-scale or nanometer-scale displacement detection is achieved.

    METHOD OF FABRICATING THIN FILM WITH VARYING THICKNESS

    公开(公告)号:US20220033954A1

    公开(公告)日:2022-02-03

    申请号:US17094754

    申请日:2020-11-10

    IPC分类号: C23C14/04 G02B5/28

    摘要: A method of fabricating a thin film with a varying thickness includes the steps of providing a shadow mask with an opening, providing a carrier plate, arranging a substrate on the carrier plate, and coating the substrate through the opening whilst rotating the carrier plate relative to the shadow mask. A plurality of zones of the substrates is swept and exposed from arcuate portions of the opening per each turn by a plurality of predetermined exposure times, respectively. The varying thickness of the thin film corresponds to variation of the predetermined exposure times.

    PRESSURE AND SHEAR FORCE MEASUREMENT DEVICE AND METHOD
    6.
    发明申请
    PRESSURE AND SHEAR FORCE MEASUREMENT DEVICE AND METHOD 有权
    压力和剪切力测量装置和方法

    公开(公告)号:US20140182391A1

    公开(公告)日:2014-07-03

    申请号:US14090619

    申请日:2013-11-26

    IPC分类号: G01N3/24

    摘要: A pressure and shear force measurement device and a pressure and shear force measurement method are disclosed. The measurement device includes a flexible substrate; a plurality of signal outputting units embedded in the flexible substrate for outputting signals; and a plurality of signal detectors disposed at a peripheral of the flexible substrate for receiving at least a signal outputted from the signal outputting units, wherein when the flexible substrate has a load applied thereon and each of the signal outputting units has a displacement, each of the signal detectors detects a pressure and a shear force resulting from the load on the flexible substrate based on the signal received from the signal outputting units.

    摘要翻译: 公开了压力和剪切力测量装置以及压力和剪切力测量方法。 测量装置包括柔性基板; 嵌入在柔性基板中用于输出信号的多个信号输出单元; 以及多个信号检测器,设置在柔性基板的周边,用于至少接收从信号输出单元输出的信号,其中当柔性基板具有施加的负载并且每个信号输出单元具有位移时, 信号检测器基于从信号输出单元接收的信号检测由柔性基板上的负载产生的压力和剪切力。

    Optical displacement sensing system

    公开(公告)号:US11015918B2

    公开(公告)日:2021-05-25

    申请号:US16600158

    申请日:2019-10-11

    摘要: An optical displacement sensing system is provided. With configuration of an optical sensor disposed on a displacement platform and in cooperation with a broadband light source and an optical spectrum analyzer, when the displacement platform moves, the waveguide grating of the optical sensor is resonated and the reflected light provided with a resonance wavelength is formed. The waveguide grating has the plurality of grating periods, and when the displacement platform moves to a different position to make the broadband light source correspond to a different grating period, the position can correspond to the different resonance wavelength. Therefore, according to the aforementioned configuration, the position is determined according to the different resonance wavelength, instead of using an optical encoder; furthermore, the micrometer-scale or nanometer-scale displacement detection is achieved.

    Biological signal analyzing device, biological sensing apparatus, sensing method and fabrication method of biological signal analyzing device

    公开(公告)号:US10775303B2

    公开(公告)日:2020-09-15

    申请号:US16440454

    申请日:2019-06-13

    IPC分类号: G01N21/41 G01N33/483

    摘要: A biological signal analyzing device configured to generate a first detection image or a second detection image is provided. The biological signal analyzing device includes a light-incident surface, a light-emitting surface and a plurality of optical-resonance structures. The sample is placed near the light incident surface, and receives a first light through the sample. The light resonance structures are configured to process the first light and generate a second and third light. The second light emits from the light emitting surface, and adapted to form the first detection image corresponding to the sample, and the third light emits from the light incident surface, and adapted to form the second detection image corresponding to the sample. The optical resonance structures vary their thickness along the first direction or vary the width along the second direction. A biological sensing apparatus, a sensing method and a fabrication method are also provided.

    Resonant wavelength measurement apparatus and measurement method thereof

    公开(公告)号:US10775237B2

    公开(公告)日:2020-09-15

    申请号:US15960828

    申请日:2018-04-24

    摘要: Disclosed is a resonant wavelength measurement apparatus, including a light source and a measurement unit. The measurement unit has a guided-mode resonance filter and a photosensitive element. The guided-mode resonance filter has a plurality of resonant areas, and each resonant area has a different filtering characteristic, to receive first light in the light source transmitted by a sensor or receive second light in the light source reflected by the sensor. The first light has a first corresponding pixel on the photosensitive element, the second light has a second corresponding pixel on the photosensitive element, and the first corresponding pixel and the second corresponding pixel correspond to a same resonant wavelength.

    BIOLOGICAL SIGNAL ANALYZING DEVICE, BIOLOGICAL SENSING APPARATUS, SENSING METHOD AND FABRICATION METHOD OF BIOLOGICAL SIGNAL ANALYZING DEVICE

    公开(公告)号:US20200182785A1

    公开(公告)日:2020-06-11

    申请号:US16440454

    申请日:2019-06-13

    IPC分类号: G01N21/41 G01N33/483

    摘要: A biological signal analyzing device configured to generate a first detection image or a second detection image is provided. The biological signal analyzing device includes a light-incident surface, a light-emitting surface and a plurality of optical-resonance structures. The sample is placed near the light incident surface, and receives a first light through the sample. The light resonance structures are configured to process the first light and generate a second and third light. The second light emits from the light emitting surface, and adapted to form the first detection image corresponding to the sample, and the third light emits from the light incident surface, and adapted to form the second detection image corresponding to the sample. The optical resonance structures vary their thickness along the first direction or vary the width along the second direction. A biological sensing apparatus, a sensing method and a fabrication method are also provided.