FUNCTIONAL FILM, LIQUID IMMERSION MEMBER, METHOD OF MANUFACTURING LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
    2.
    发明申请
    FUNCTIONAL FILM, LIQUID IMMERSION MEMBER, METHOD OF MANUFACTURING LIQUID IMMERSION MEMBER, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 审中-公开
    功能膜,液体浸没部件,制造液体浸没部件的方法,曝光装置和装置制造方法

    公开(公告)号:US20150241784A1

    公开(公告)日:2015-08-27

    申请号:US14707454

    申请日:2015-05-08

    Abstract: A mesh member including a base material having a mesh portion and a film of Ti-doped tetrahedral amorphous carbon coated on the mesh portion. An atomic ratio of Ti to C in a composition of the film (ta-C:Ti film) is equal to or greater than 0.03 and equal to or less than 0.09. The atomic ratio of Ti to C is equal to a number of Ti atoms occupying the film divided by a sum of a number of carbon atoms having an sp3 hybrid orbital and a number of carbon atoms having an sp2 hybrid orbital occupying the film.

    Abstract translation: 一种网状构件,其包括具有网状部分的基材和涂覆在网状部分上的掺杂Ti的四面体非晶碳的膜。 膜(ta-C:Ti膜)的组成中Ti与C的原子比等于或大于0.03且等于或小于0.09。 Ti与C的原子比等于占据该膜的Ti原子数除以具有sp3杂化轨道的碳原子数和具有占据该膜的sp2混合轨道的碳原子数之和的总和。

    CONDUCTIVE SLIDING FILM, MEMBER FORMED FROM CONDUCTIVE SLIDING FILM, AND METHOD FOR PRODUCING SAME
    5.
    发明申请
    CONDUCTIVE SLIDING FILM, MEMBER FORMED FROM CONDUCTIVE SLIDING FILM, AND METHOD FOR PRODUCING SAME 审中-公开
    导电滑动膜,由导电滑动膜形成的构件及其制造方法

    公开(公告)号:US20130058640A1

    公开(公告)日:2013-03-07

    申请号:US13666523

    申请日:2012-11-01

    Inventor: Yusuke TAKI

    Abstract: There is provided a conductive sliding film applied to a surface of a member which moves slidably relative to other member, the conductive sliding film being formed of a metal-doped tetrahedral amorphous carbon which is doped with a metal element, wherein resistivity of the conductive sliding film is within a range of 102 to 10−4 [Ωcm] and surface hardness of the conductive sliding film is within a range of 10 to 30 [GPa]. The conductive sliding film has high wear resistance and satisfactory slidability, and is suitable for a mount member for a camera.

    Abstract translation: 提供了一种导电滑动膜,其被施加到相对于其它构件可滑动地移动的构件的表面,导电滑动膜由掺杂有金属元素的金属掺杂的四面体非晶碳形成,其中导电滑动 膜在102〜10 -4 [Ω] cm的范围内,导电性滑动膜的表面硬度在10〜30 [GPa]的范围内。 导电性滑动膜具有高耐磨性和令人满意的滑动性,适用于摄像机的安装构件。

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