LOW RESISTIVITY OHMIC CONTACT
    2.
    发明申请
    LOW RESISTIVITY OHMIC CONTACT 有权
    低电阻OHMIC联系

    公开(公告)号:US20150200098A1

    公开(公告)日:2015-07-16

    申请号:US14599123

    申请日:2015-01-16

    摘要: Embodiments of a low resistivity ohmic contact are disclosed. In some embodiments, a method of fabricating a low resistivity ohmic contact includes providing a semiconductor material layer and intentionally roughening the semiconductor material layer to create a characteristic surface roughness. The method also includes providing an ohmic contact metal layer on a surface of the semiconductor material layer and providing a diffusion barrier metal layer on a surface of the ohmic contact metal layer opposite the semiconductor material layer. In this way, the adhesive force between the semiconductor material layer and the ohmic contact metal layer may be increased.

    摘要翻译: 公开了低电阻率欧姆接触的实施例。 在一些实施例中,制造低电阻率欧姆接触的方法包括提供半导体材料层并有意地使半导体材料层变粗糙以产生特征表面粗糙度。 该方法还包括在半导体材料层的表面上提供欧姆接触金属层,并在与半导体材料层相对的欧姆接触金属层的表面上提供扩散阻挡金属层。 以这种方式,可以增加半导体材料层和欧姆接触金属层之间的粘合力。