公开(公告)号：US3714491A

公开(公告)日：1973-01-30

申请号：US3714491D

申请日：1970-04-13

Applicant: RCA LTD

Inventor： MC INTYRE R ,  SPRINGINGS H

IPC: G01J1/02 ,  G01S3/783 ,  H01L31/02 ,  H01L31/103 ,  H01L31/16 ,  H01J39/06 ,  H01L15/06

CPC classification number: G01S3/783 ,  H01L31/02024 ,  H01L31/103

Abstract: A quadrant photodiode including a flat substrate of high resistivity semiconductor material, such as silicon, of one conductivity type having a thin region of the one conductivity type within and extending across one surface thereof and four quadrant shaped regions of the opposite conductivity type in its other surface. The quadrant shaped regions are arranged in a circle with the straight edges of adjacent quadrants being in closely spaced relation. The surface of the substrate having the one conductivity type region therein is provided with V-shaped grooves which are directly opposed to and extend along the spaces between the edges of the quadrant-shaped regions. The surfaces of the grooves serve to refract the light which is incident on the surface toward the quadrant-shaped regions so as to prevent optical cross-talk between the quadrant-shaped regions.

Abstract translation: 一个象限光电二极管，包括一个导电类型的高电阻率半导体材料（如硅）的平坦基片，其中一个导电类型的薄区域在其一个表面内延伸，并在其另一个表面延伸，另一个导电类型的四个象限区域在另一个 表面。 象限形状区域被布置成圆形，相邻象限的直边缘处于紧密间隔的关系。 其中具有一个导电类型区域的基板的表面设置有与四边形区域的边缘之间的空间直接相对且延伸的V形槽。 槽的表面用于将入射在表面上的光朝向四分之一区域折射，以防止象限区域之间的光学串扰。