公开(公告)号：US20160102978A1

公开(公告)日：2016-04-14

申请号：US14880527

申请日：2015-10-12

Applicant: RICHTEK TECHNOLOGY CORPORATION

Inventor： Lupu Liao ,  Chiung-C. Lo ,  Ying-Che Lo

IPC: G01C19/56

CPC classification number: G01C19/5726 ,  G01C19/56

Abstract: A rotation velocity sensor includes a driving unit, a proof mass, a rotation sensing element, a compensating unit, and a rotation sensing unit. The driving unit generates a vibration driving signal and a reference signal. The proof mass is driven by the vibration driving signal to vibrate in a first direction. The rotation sensing element senses a vibration of the proof mass to generate a charge signal which corresponds to a portion of the vibration of the proof mass in a second direction orthogonal to the first direction. The compensating unit generates a compensation signal according to the reference signal. The rotation sensing unit converts the charge signal to a voltage signal or a current signal, and compensates the voltage signal or the current signal according to the compensation signal to cancel a noise in the second direction.

Abstract translation: 旋转速度传感器包括驱动单元，检测质量块，旋转感测元件，补偿单元和旋转感测单元。 驱动单元产生振动驱动信号和参考信号。 检测质量由振动驱动信号驱动，以沿第一方向振动。 旋转检测元件感测证明物质的振动，以产生对应于在与第一方向正交的第二方向上的证明物质的振动的一部分的电荷信号。 补偿单元根据参考信号生成补偿信号。 旋转感测单元将充电信号转换为电压信号或电流信号，并根据补偿信号补偿电压信号或电流信号，以消除第二方向的噪声。

公开(公告)号：US20170030741A1

公开(公告)日：2017-02-02

申请号：US15057912

申请日：2016-03-01

Applicant: Richtek Technology Corporation

Inventor： Chiung-Wen Lin ,  Chiung-C. Lo ,  Chia-Yu Wu

IPC: G01D5/241 ,  G01D18/00

CPC classification number: G01D5/2417 ,  G01D5/24 ,  G01D18/00

Abstract: A MEMS device includes: a fixed structure, a movable structure, and a compensation circuit. The fixed structure includes a fixed electrode and a fixed compensation electrode. The movable structure includes a movable electrode and a movable compensation electrode. The movable electrode and the fixed electrode form a sensing capacitor, and the movable compensation electrode and the fixed compensation electrode form a compensation capacitor. The compensation circuit compensates a sensing signal generated by the sensing capacitor with a compensation signal generated by the compensation capacitor. The sensing capacitor and the compensation capacitor do not form a differential capacitor pair. A proportion of the sensing area of the compensation capacitor to the sensing area of the sensing capacitor is lower than 1.

Abstract translation: MEMS器件包括：固定结构，可移动结构和补偿电路。 固定结构包括固定电极和固定补偿电极。 可移动结构包括可移动电极和可移动​​补偿电极。 可动电极和固定电极形成感测电容器，可动补偿电极和固定补偿电极形成补偿电容器。 补偿电路用由补偿电容器产生的补偿信号来补偿感测电容器产生的感测信号。 感测电容器和补偿电容器不形成差分电容器对。 补偿电容器的感测区域与感测电容器的感测区域的比例小于1。