公开(公告)号：US20240077424A1

公开(公告)日：2024-03-07

申请号：US18222608

申请日：2023-07-17

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Hyunwoo RYOO ,  Seulji Song ,  Minji Jeon ,  Hidong Kwak ,  Jeongho Ahn

IPC: G01N21/65 ,  G01J3/02 ,  G01J3/44

CPC classification number: G01N21/65 ,  G01J3/0216 ,  G01J3/4412

Abstract: A semiconductor-device inspection apparatus includes a stage configured to allow a measurement target to be placed thereon, an actuator configured to move the stage in a vertical direction, a detector configured to detect a plurality of Raman spectra from scattered light that has been scattered away from the measurement target, and a processor configured to generate a plurality of spectral images for a measurement variable by using the plurality of Raman spectra detected by the detector, wherein the detector is further configured to detect the plurality of Raman spectra at different vertical levels of the measurement target.