公开(公告)号：US20250027875A1

公开(公告)日：2025-01-23

申请号：US18775796

申请日：2024-07-17

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jinwoo Lee ,  Seungryeol Oh ,  Hidong Kwak ,  Jeongho Ahn ,  Seongsil Lee ,  Suyoung Lee ,  Hyeongcheol Lee

IPC: G01N21/31

Abstract: An optical imaging device includes a pulse generator including a pulse generating device configured to generate pulse lasers and a pulse expander configured to receive a pulse laser from the pulse generating device, and generate a broadened pulse laser by expanding a spectrum and width of the received pulse laser, an optical assembly including an objective lens configured to receive the broadened pulse laser and pass the received broadened pulse laser to a target object, and a light receiver including a light receiving device configured to receive a reflected pulse laser corresponding to the broadened pulse laser reflected from the target object and convert the reflected pulse laser into an electrical signal, and at least one processor configured to generate a spectral image set based on the electrical signal generated by the light receiving device.

公开(公告)号：US20240077424A1

公开(公告)日：2024-03-07

申请号：US18222608

申请日：2023-07-17

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Hyunwoo RYOO ,  Seulji Song ,  Minji Jeon ,  Hidong Kwak ,  Jeongho Ahn

IPC: G01N21/65 ,  G01J3/02 ,  G01J3/44

CPC classification number: G01N21/65 ,  G01J3/0216 ,  G01J3/4412

Abstract: A semiconductor-device inspection apparatus includes a stage configured to allow a measurement target to be placed thereon, an actuator configured to move the stage in a vertical direction, a detector configured to detect a plurality of Raman spectra from scattered light that has been scattered away from the measurement target, and a processor configured to generate a plurality of spectral images for a measurement variable by using the plurality of Raman spectra detected by the detector, wherein the detector is further configured to detect the plurality of Raman spectra at different vertical levels of the measurement target.