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公开(公告)号:US20230180641A1
公开(公告)日:2023-06-08
申请号:US18071740
申请日:2022-11-30
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Zhe WU , Taeguen KIM , Jeonghee PARK , Taehyeong KIM , Minji YU
CPC classification number: H01L45/06 , H01L45/1226 , H01L27/2472 , G11C13/0011 , G11C13/0026 , G11C13/0028
Abstract: A variable resistance memory device includes a substrate, a first conductive line on the substrate, the first conductive line extending in a first horizontal direction, a second conductive line extending on the first conductive line in a second horizontal direction perpendicular to the first horizontal direction, and a memory cell at an intersection between the first conductive line and the second conductive line, the memory cell having a selection element layer, an intermediate electrode layer, and a variable resistance layer, and the variable resistance layer having a shape of stairs with a concave center.