公开(公告)号：US20220181168A1

公开(公告)日：2022-06-09

申请号：US17543761

申请日：2021-12-07

Applicant: SEMES CO., LTD.

Inventor： KANG SEOP YUN ,  CHUL GOO KIM ,  JUNG BONG CHOI ,  SOO HAN SONG

IPC: H01L21/67 ,  H01L21/687

Abstract: The inventive concept provides a substrate support unit comprising a chuck supporting and rotating a substrate; and a lamp unit provided below the substrate to heat the substrate, wherein the lamp unit comprises a first lamp having a reflective layer on the surface thereof, to block and/or reflect a light which is emitted from the first lamp but not directed to the substrate to direct the light to the substrate.