SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM USING THE SAME

    公开(公告)号:US20240239099A1

    公开(公告)日:2024-07-18

    申请号:US18411107

    申请日:2024-01-12

    Abstract: A substrate processing method includes determining a first impact of an ink droplet ejected toward a substrate moving at a first speed, determining a second impact of an ink droplet ejected toward the substrate moving at a second speed, determining a reference ejection speed based on the first impact and the second impact, determining a plurality of third impacts of a plurality of ink droplets respectively ejected from a plurality of nozzles toward the substrate moving at a third speed, determining an ink ejection speed of each of the plurality of nozzles based on the first impact and the plurality of third impacts, and comparing the ink ejection speeds of the plurality of nozzles with the reference ejection speed and determining whether ink ejection performance of the plurality of nozzles is abnormal.

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