公开(公告)号：US20230133485A1

公开(公告)日：2023-05-04

申请号：US18048982

申请日：2022-10-24

Applicant: SHOWA DENKO K.K.

Inventor： Hiromitsu Tanuma ,  Shinichi Nakayama ,  Nor Razali Rohman Mumod Ali ,  Kok Sheng Lim

IPC: C23C16/509

Abstract: An electrode filament connection member configured to be attached so as to pass through an outer wall of a chemical vapor deposition apparatus in which an electrode filament is disposed in a chamber is provided, and to form an electrical connection between a wire from a power source and the electrode filament. The electrode filament connection member includes a head portion attached to the electrode filament, and a rod portion that extends through the outer wall and is connected to the wire. The head portion includes an electrode filament attachment portion at a tip end portion, and a side surface that is parallel to an axial direction or is gradually widened from the tip end portion toward the outer wall. An outer shape of the side surface of the head portion conforms to an outer shape of the electrode filament connection member when viewed in projection along the axial direction.