MICROELECTROMECHANICAL GYROSCOPE WITH CALIBRATED SYNCHRONIZATION OF ACTUATION AND METHOD FOR ACTUATING A MICROELECTROMECHANICAL GYROSCOPE
    1.
    发明申请
    MICROELECTROMECHANICAL GYROSCOPE WITH CALIBRATED SYNCHRONIZATION OF ACTUATION AND METHOD FOR ACTUATING A MICROELECTROMECHANICAL GYROSCOPE 审中-公开
    具有校准同步的微电子陀螺仪和用于致动微电子陀螺仪的方法

    公开(公告)号:US20130239680A1

    公开(公告)日:2013-09-19

    申请号:US13886774

    申请日:2013-05-03

    CPC classification number: G01C19/56 G01C19/5726 G01C19/5762

    Abstract: A gyroscope includes a body, a driving mass, which is mobile according to a driving axis, and a sensing mass, which is driven by the driving mass and is mobile according to a sensing axis, in response to rotations of the body. A driving device forms a microelectromechanical control loop with the body and the driving mass and maintains the driving mass in oscillation with a driving frequency. The driving device comprises a frequency detector, which supplies a clock signal at the frequency of oscillation of the driving mass, and a synchronization stage, which applies a calibrated phase shift to the clock signal so as to compensate a phase shift caused by components of the loop that are set between the driving mass and the control node.

    Abstract translation: 陀螺仪包括根据驱动轴可移动的主体,驱动质量块,以及响应于身体的旋转而被驱动质量块驱动并且根据感测轴线可移动的感测质量块。 驱动装置与主体和驱动质量形成微机电控制回路,并以驱动频率保持驱动质量振荡。 驱动装置包括频率检测器,其以驱动质量的振荡频率提供时钟信号,以及同步级,其对校准的相移施加到时钟信号,以便补偿由相位差 循环,其设置在驱动质量块和控制节点之间。

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