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    Micro-gyroscope and method for operating a micro-gyroscope
    3.
    发明授权
    Micro-gyroscope and method for operating a micro-gyroscope 有权

    公开(公告)号：US09719784B2

    公开(公告)日：2017-08-01

    申请号：US14828306

    申请日：2015-08-17

    申请人： Hanking Electronics, Ltd.

    发明人： Martin Heller

    IPC分类号： G01C19/56 ,  G01C19/5747 ,  G01C19/5762 ,  G01C19/5712

    CPC分类号： G01C19/5712 ,  G01C19/56 ,  G01C19/5747 ,  G01C19/5762

    摘要： A micro-gyroscope for determining a rate of rotation about a Z-axis includes a substrate and two sensor devices each of which comprises at least one drive mass, at least one anchor, drive elements, at least one sensor mass and sensor elements. The drive mass is mounted linearly displaceably in the direction of an X-axis, and can be driven in an oscillatory manner with respect to the X-axis. The sensor mass is coupled to the drive mass by means of springs. The sensor mass is displaceable in the Y-direction, and sensor elements detects a deflection of the sensor mass in the Y-axis. The two sensor devices are disposed parallel to each other and one above the other in the direction of the Z-axis, and the drive mass in these two sensor devices are coupled to each other by means of a coupling spring.

    Angular velocity sensor
    5.
    发明授权
    Angular velocity sensor 有权
    角速度传感器

    公开(公告)号：US09568490B2

    公开(公告)日：2017-02-14

    申请号：US14383335

    申请日：2012-03-19

    申请人： Heewon Jeong ,  Masahide Hayashi ,  Kiyoko Yamanaka

    发明人： Heewon Jeong ,  Masahide Hayashi ,  Kiyoko Yamanaka

    IPC分类号： G01C19/00 ,  G01C19/02 ,  G01C19/5726 ,  G01C19/5762 ,  G01C19/5719

    CPC分类号： G01P9/02 ,  G01C19/5719 ,  G01C19/5726 ,  G01C19/5762

    摘要： Provided is an angular velocity sensor including a plurality of angular velocity detection units each outputting a different detection result, and including a common driving circuit to drive the angular velocity detection units. The angular velocity detection units of the angular velocity sensor of the present invention are configured to have different driving amplitudes when being driven by a driving signal at the same frequency.

    摘要翻译： 提供了一种角速度传感器，其包括多个角速度检测单元，每个角速度检测单元输出不同的检测结果，并且包括用于驱动角速度检测单元的公共驱动电路。 本发明的角速度传感器的角速度检测单元被配置为当由相同频率的驱动信号驱动时具有不同的驱动振幅。

    VIBRATING MICRO-MECHANICAL SENSOR OF ANGULAR VELOCITY
    6.
    发明申请
    VIBRATING MICRO-MECHANICAL SENSOR OF ANGULAR VELOCITY 审中-公开
    振动微机械传感器的角速度

    公开(公告)号：US20160334215A1

    公开(公告)日：2016-11-17

    申请号：US15152931

    申请日：2016-05-12

    申请人： MURATA MANUFACTURING CO., LTD.

    发明人： Yoshitaka KATO

    IPC分类号： G01C19/5719

    CPC分类号： G01C19/5719 ,  G01C19/5712 ,  G01C19/5747 ,  G01C19/5762

    摘要： A sensor structure and a method for operating a vibrating sensor of angular velocity comprising a rotor mass and two linearly moving masses is disclosed. The sensor structure and method comprises a rotor mass, two linearly moving masses, and two T-shaped levers each coupled with the two linearly moving masses and to the rotor mass. The T-shaped levers enable the rotor mass and the two linearly moving masses to be excited into an anti-phase primary mode, where the direction of angular momentum of the rotor mass is opposite to the direction of angular momenta of the linearly moving masses. Angular momenta of the rotor mass and the linearly moving masses cancel each other to a high extent, so that the total sum of angular momentum of the structure is very small. Nominal frequency of the anti-phase primary mode is distinctively low as compared to nominal frequencies of other possible primary modes, such as a parallel phase primary mode.

    摘要翻译： 公开了一种用于操作包括转子质量和两个线性移动质量的角速度振动传感器的传感器结构和方法。 传感器结构和方法包括转子质量，两个线性运动质量，以及两个与两个线性移动质量块和转子质量相耦合的T形杆。 T形杆使转子质量和两个线性移动质量块被激发成反相初级模式，其中转子质量的角动量的方向与线性运动质量块的角动量方向相反。 转子质量的角动量和线性移动质量块大大抵消，使得结构的角动量的总和非常小。 与其他可能的主要模式的标称频率（例如并联相位主模式）相比，反相初级模式的标称频率明显较低。

    Microelectromechanical device having an oscillating mass and a forcing stage, and method of controlling a microelectromechanical device
    7.
    发明授权
    Microelectromechanical device having an oscillating mass and a forcing stage, and method of controlling a microelectromechanical device 有权
    具有振荡质量和强迫级的微机电装置以及控制微机电装置的方法

    公开(公告)号：US09448071B2

    公开(公告)日：2016-09-20

    申请号：US13799243

    申请日：2013-03-13

    申请人： STMicroelectronics S.r.l.

    发明人： Marco Garbarino ,  Andrea Donadel ,  Davide Magnoni ,  Carlo Valzasina

    IPC分类号： G01C19/56 ,  G01C19/5762 ,  G01C19/5726

    CPC分类号： G01C19/5762 ,  G01C19/5726

    摘要： A microelectromechanical device includes: a body; a movable mass, elastically coupled to the body and oscillatable with respect to the body according to a degree of freedom; a frequency detector, configured to detect a current oscillation frequency of the movable mass; and a forcing stage, capacitively coupled to the movable mass and configured to provide energy to the movable mass through forcing signals having a forcing frequency equal to the current oscillation frequency detected by the frequency detector, at least in a first transient operating condition.

    摘要翻译： 微机电装置包括：主体; 弹性联接到所述主体并且相对于所述主体可根据自由度而可振动的可动质量块; 频率检测器，被配置为检测所述可移动质量块的当前振荡频率; 以及强制级，其电容耦合到所述可移动质量块，并且被配置为至少在第一瞬态操作条件下通过强制具有等于由所述频率检测器检测到的当前振荡频率的强制频率的信号向所述可移动质量块提供能量。

    Method and Circuit For The Time-Continuous Detection Of The Position Of The Sensor Mass With Simultaneous Feedback For Capacitive Sensors
    8.
    发明申请
    Method and Circuit For The Time-Continuous Detection Of The Position Of The Sensor Mass With Simultaneous Feedback For Capacitive Sensors 审中-公开
    用于电容式传感器同时反馈的传感器质量位置的时间连续检测的方法和电路

    公开(公告)号：US20160202061A1

    公开(公告)日：2016-07-14

    申请号：US15076062

    申请日：2016-03-21

    申请人： Albert-Ludwigs-Universitat Freiburg

    发明人： Michael Maurer ,  Sebastian Nessler ,  Yiannos Manoli

    IPC分类号： G01C19/5726 ,  G01C19/5755

    CPC分类号： G01C19/5726 ,  G01C19/5755 ,  G01C19/5762 ,  G01C19/5776 ,  G01P15/125

    摘要： The invention relates to a detection circuit for reading out at least one position signal of a micromechanical capacitive sensor having at least one oscillating element that can be excited so as to move in an oscillating manner. In particular, the invention relates to a sensor that is operated in a closed control loop by using the detection circuit according to the invention. The invention further relates to a method for operating such a sensor. During operation, a first input connection of the detection circuit (100) is connected to an output connection of the capacitive sensor (106) and an output connection of the detection circuit (100) is connected to a loop filter of a control loop (102), wherein the control loop feeds back a feedback voltage for providing a restoring force in dependence on an output voltage of the control loop (102) to a second input connection of the detection circuit (100). The detection circuit (100) comprises at least one further feedback branch (Rfb, Cfb), and the output voltage of the control loop (102) is modulated onto an in-phase input voltage of the detection circuit.

    摘要翻译： 本发明涉及一种用于读出具有至少一个振荡元件的微机电电容传感器的至少一个位置信号的检测电路，该振荡元件可被激励以便以振荡方式移动。 特别地，本发明涉及通过使用根据本发明的检测电路在闭合控制环路中操作的传感器。 本发明还涉及一种用于操作这种传感器的方法。 在操作期间，检测电路（100）的第一输入连接连接到电容传感器（106）的输出连接，检测电路（100）的输出连接被连接到控制回路（102）的环路滤波器 ），其中所述控制回路反馈反馈电压，以根据所述控制回路（102）的输出电压提供到所述检测电路（100）的第二输入连接的恢复力。 检测电路（100）包括至少一个另外的反馈分支（Rfb，Cfb），并且控制回路（102）的输出电压被调制到检测电路的同相输入电压。

    Gyro sensor and electronic apparatus
    9.
    发明授权
    Gyro sensor and electronic apparatus 有权
    陀螺传感器和电子仪器

    公开(公告)号：US09389078B2

    公开(公告)日：2016-07-12

    申请号：US13856578

    申请日：2013-04-04

    申请人： Seiko Epson Corporation

    发明人： Kei Kanemoto

    IPC分类号： G01C19/56 ,  G01C19/5762 ,  G01C19/5747

    CPC分类号： G01C19/5762 ,  G01C19/5747

    摘要： A gyro sensor includes a first detection mass unit provided with a drive mass unit, a drive unit, a first detection unit and a first vibrating body; and a second detection mass unit provided with a second detection unit and a second vibrating body, the first vibrating body extends in the direction of the first axis and one end thereof is connected to the first detection mass unit, the second vibrating body extends in a direction that is opposite to an extension direction of the first vibrating body, and one end thereof is connected to the second detection mass unit, and the vibrating bodies vibrate in the direction of a third axis, along with the vibration in the direction of the first axis.

    摘要翻译： 陀螺传感器包括设置有驱动质量单元的第一检测质量单元，驱动单元，第一检测单元和第一振动体; 以及设置有第二检测单元和第二振动体的第二检测质量单元，所述第一振动体沿所述第一轴线的方向延伸，其一端与所述第一检测质量单元连接，所述第二振动体以 方向与第一振动体的延伸方向相反，并且其一端连接到第二检测质量单元，并且振动体沿着第三轴的方向沿第一轴线的方向振动 轴。

    MICROELECTROMECHANICAL DEVICE HAVING AN OSCILLATING MASS AND A FORCING STAGE, AND METHOD OF CONTROLLING A MICROELECTROMECHANICAL DEVICE
    10.
    发明申请
    MICROELECTROMECHANICAL DEVICE HAVING AN OSCILLATING MASS AND A FORCING STAGE, AND METHOD OF CONTROLLING A MICROELECTROMECHANICAL DEVICE 审中-公开
    具有振荡质量和强度的微电子设备，以及控制微电子设备的方法

    公开(公告)号：US20160109237A1

    公开(公告)日：2016-04-21

    申请号：US14985071

    申请日：2015-12-30

    申请人： STMicroelectronics S.R.L.

    发明人： Marco Garbarino ,  Andrea Donadel ,  Davide Magnoni ,  Carlo Valzasina

    IPC分类号： G01C19/5762 ,  G01C19/5726

    CPC分类号： G01C19/5762 ,  G01C19/5726

    摘要： A microelectromechanical device includes: a body; a movable mass, elastically coupled to the body and oscillatable with respect to the body according to a degree of freedom; a frequency detector, configured to detect a current oscillation frequency of the movable mass; and a forcing stage, capacitively coupled to the movable mass and configured to provide energy to the movable mass through forcing signals having a forcing frequency equal to the current oscillation frequency detected by the frequency detector, at least in a first transient operating condition.

    摘要翻译： 微机电装置包括：主体; 弹性联接到所述主体并且相对于所述主体可根据自由度而可振动的可动质量块; 频率检测器，被配置为检测所述可移动质量块的当前振荡频率; 以及强制级，其电容耦合到所述可移动质量块，并且被配置为至少在第一瞬态操作条件下通过强制具有等于由所述频率检测器检测到的当前振荡频率的强制频率的信号向所述可移动质量块提供能量。