公开(公告)号：US20160261941A1

公开(公告)日：2016-09-08

申请号：US14943848

申请日：2015-11-17

Applicant: STMICROELECTRONICS S.R.L. ,  STMICROELECTRONICS (MALTA) LTD

Inventor： Roberto BRIOSCHI ,  Silvia ADORNO ,  Kenneth FONK

IPC: H04R1/08 ,  B81C1/00 ,  H04R31/00 ,  B81B7/00 ,  H04R19/00 ,  H04R19/04

CPC classification number: H04R1/086 ,  B81B7/0058 ,  B81B7/0061 ,  B81B2201/0257 ,  B81B2203/0127 ,  B81B2207/012 ,  B81B2207/07 ,  B81C1/00309 ,  B81C2203/0785 ,  H01L2224/48137 ,  H01L2224/48227 ,  H04R19/005 ,  H04R19/04 ,  H04R31/00 ,  H04R31/006

Abstract: A semiconductor integrated device, comprising: a package defining an internal space and having an acoustic-access opening in acoustic communication with an environment external to the package; a MEMS acoustic transducer, housed in the internal space and provided with an acoustic chamber facing the acoustic-access opening; and a filtering module, which is designed to inhibit passage of contaminating particles having dimensions larger than a filtering dimension and is set between the MEMS acoustic transducer and the acoustic-access opening. The filtering module defines at least one direct acoustic path between the acoustic-access opening and the acoustic chamber.

Abstract translation: 一种半导体集成器件，包括：限定内部空间并且具有与所述封装外部的环境声学连通的声学通路开口的封装; MEMS声学换能器，其容纳在内部空间中并且设置有面向声学进入开口的声学室; 以及过滤模块，其设计成抑制具有大于过滤尺寸的尺寸的污染颗粒的通过并设置在MEMS声学换能器和声学通路开口之间。 滤波模块限定声学通道开口和声学室之间的至少一个直接声路径。