METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE

    公开(公告)号:US20230258866A1

    公开(公告)日:2023-08-17

    申请号:US18152435

    申请日:2023-01-10

    CPC classification number: G02B6/136 G02B6/132 G02B2006/12061

    Abstract: In accordance with an embodiment, a method for manufacturing a semiconductor device includes forming a first front layer and a first rear layer of a first material respectively on a front main face and a rear main face of a semiconductor substrate wafer; forming a first plurality of trenches and a second plurality of trenches respectively in a surface of the first front layer and in a surface of the first rear layer; forming a second front layer of a second material on the first front layer, where the second front layer extends over the first front layer, in the first plurality of trenches, and between the first plurality of trenches on the surface of the first front layer; and forming a second rear layer of the second material on the surface of the first rear layer, wherein the second rear layer extends over the first rear layer, in the second plurality of trenches, and between the second plurality of trenches on the surface of the first rear layer.

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