公开(公告)号：US20210018458A1

公开(公告)日：2021-01-21

申请号：US16928551

申请日：2020-07-14

Applicant: STMicroelectronics (Rousset) SAS

Inventor： Matthias VIDAL-DHO ,  Quentin HUBERT ,  Pascal FORNARA

IPC: G01N27/22 ,  H01L23/00 ,  G01N27/12

Abstract: Moisture that is possibly present in an integrated circuit is detected autonomously by the integrated circuit itself. An interconnect region of the integrated circuit includes a metal level with a first track and a second track which are separated by a dielectric material. A detection circuit applies a potential difference between the first and second tracks. A current circulating in one of the first and second tracks in response to the potential difference is measured and compared to a threshold. If the current exceeds the threshold, this is indicative of the presence of moisture which renders said dielectric material less insulating.