公开(公告)号：US20200241068A1

公开(公告)日：2020-07-30

申请号：US16746201

申请日：2020-01-17

Applicant: STMicroelectronics Pte Ltd

Inventor： Pedro Jr Santos PERALTA ,  David GANI

IPC: G01R31/28 ,  G01R31/26 ,  G01R31/3185 ,  H01L21/66

Abstract: A method of testing integrated circuit die for presence of a crack includes performing back end integrated circuit fabrication processes on a wafer having a plurality of integrated circuit die, the back end fabrication including an assembly process. The assembly process includes a) lowering a tip of a first manipulator arm to contact a given die such that pogo pins extending from the tip make electrical contact with conductive areas on the given die so that the pogo pins are electrically connected to a crack detector on the given die, b) picking up the given die using the first manipulator arm, and c) performing a conductivity test on the crack detector using the pogo pins to determine presence of a crack in the given die that extends from a periphery of the die, through a die seal ring of the die, and into an integrated circuit region of the die.

公开(公告)号：US20220291277A1

公开(公告)日：2022-09-15

申请号：US17826705

申请日：2022-05-27

Applicant: STMicroelectronics Pte Ltd

Inventor： Pedro Jr Santos PERALTA ,  David GANI

IPC: G01R31/28 ,  H01L21/66 ,  G01R31/3185 ,  G01R31/26

Abstract: A method of testing an integrated circuit die (IC) for cracks includes performing an assembly process on a wafer including multiple ICs including: lowering a tip of a first manipulator arm to contact and pick up a given IC, flipping the given IC such that a surface of the IC facing the wafer faces a different direction, and transferring the IC to a tip of a second manipulator arm, applying pressure from the second manipulator arm to the given IC such that pogo pins extending from the tip of the first manipulator arm make electrical contact with conductive areas of the IC for connection to a crack detector on the IC, and performing a conductivity test on the crack detector using the pogo pins. If the conductivity test indicates a lack of presence of a crack, then the second manipulator arm is used to continue processing of the given IC.