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公开(公告)号:US20240181766A1
公开(公告)日:2024-06-06
申请号:US18226458
申请日:2023-07-26
Applicant: Samsung Display Co., LTD.
Inventor: TAEYOUNG PARK , SUKJU KANG , TETSUYA OKAMOTO , BYUNG MOO KIM , SANG CHEOL KIM , MYUNG-HUN OH , DONGGUL LEE , JUN-HEE LEE
CPC classification number: B32B38/18 , B32B37/0046
Abstract: An alignment device includes: a first stage; a plurality of base plates disposed on the first stage and on which a material is placed; and a plurality of second stages disposed under the first stage, and connected to the plurality of base plates, respectively, and capable of aligning each of the plurality of base plates in X, Y, and ⊖ directions.