公开(公告)号：US20250149371A1

公开(公告)日：2025-05-08

申请号：US18931528

申请日：2024-10-30

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： TAEYOUNG PARK ,  MINSEOK KANG ,  MYUNG-HUN OH ,  TETSUYA OKAMOTO ,  BYUNG MOO KIM

IPC: H01L21/683 ,  B23Q3/15 ,  B32B37/00 ,  B32B37/10

Abstract: An electrostatic chuck unit includes a first electrostatic chuck that includes a first plate that includes a surface that is concavely curved in a first direction and a first electrode pattern disposed on the surface of the first plate, and a second electrostatic chuck spaced apart from the first electrostatic chuck in a second direction opposite to the first direction and that includes a second plate that includes a surface adjacent to the first electrostatic chuck and that is convexly curved in the first direction and a second electrode pattern disposed on the surface of the second plate. Each of the first electrode pattern and the second electrode pattern includes an electrode, and a width of the electrode is between 10 mm and 30 mm.

公开(公告)号：US20240181766A1

公开(公告)日：2024-06-06

申请号：US18226458

申请日：2023-07-26

Applicant: Samsung Display Co., LTD.

Inventor： TAEYOUNG PARK ,  SUKJU KANG ,  TETSUYA OKAMOTO ,  BYUNG MOO KIM ,  SANG CHEOL KIM ,  MYUNG-HUN OH ,  DONGGUL LEE ,  JUN-HEE LEE

IPC: B32B38/18 ,  B32B37/00

CPC classification number: B32B38/18 ,  B32B37/0046

Abstract: An alignment device includes: a first stage; a plurality of base plates disposed on the first stage and on which a material is placed; and a plurality of second stages disposed under the first stage, and connected to the plurality of base plates, respectively, and capable of aligning each of the plurality of base plates in X, Y, and ⊖ directions.