公开(公告)号：US20240084433A1

公开(公告)日：2024-03-14

申请号：US18239508

申请日：2023-08-29

Applicant: Samsung Display Co., LTD.

Inventor： KYONGHO HONG ,  SUNGHO PARK ,  JUNGSEOB LEE ,  JUNHYEUK KO ,  EUIGYU KIM ,  SANG MIN YI ,  SANGJIN HAN

IPC: C23C14/04 ,  H10K71/16

CPC classification number: C23C14/042 ,  H10K71/166

Abstract: A stage unit includes a stage that provides a seating surface and has an opening formed through the seating surface, a first support unit disposed below the opening and coupled to the stage, a second support unit disposed below the opening and coupled to the stage, where the second support unit is spaced apart from the first support unit on a plane, and a flatness measurement unit supported by the first support unit. Each of the first support unit and the second support unit provides a support surface that crosses the seating surface, and the support surface of the first support unit and the support surface of the second support unit are movable in a direction toward and away from the opening.