公开(公告)号：US20250098512A1

公开(公告)日：2025-03-20

申请号：US18787845

申请日：2024-07-29

Applicant: Samsung Display Co., LTD.

Inventor： Jong-Hee LIM ,  Jaeil KIM ,  Hak-Min KIM ,  Hyoung-Joo KIM ,  Jin Pyung LEE ,  Eun Su JUN ,  Il Young JEONG ,  Sang Sun HAN

IPC: H10K71/00 ,  B23K26/082 ,  B23K26/142 ,  B23K26/38

Abstract: A suction unit control method includes simulating an air flow about a suction port, through which fumes generated when a laser beam is radiated on a target substrate on a stage unit to cut the target substrate are sucked up, installing an air blower on three or four sides around a laser cutting end at a height close to the suction port, controlling on and off of first to fourth solenoid valves of the air blower based on a movement of the stage unit while performing laser cutting on the target substrate while moving the stage unit.