LASER DEVICE
    3.
    发明申请

    公开(公告)号:US20210364769A1

    公开(公告)日:2021-11-25

    申请号:US17239732

    申请日:2021-04-26

    Abstract: A laser device includes a light source generating a laser beam, a stage, and a lens assembly disposed between the light source and the stage and irradiating the laser beam to a substrate disposed on the stage. The lens assembly includes a first lens assembly making divergent the laser beam provided from the light source, a deflector changing a path of the laser beam provided from the first lens assembly, and a second lens assembly condensing the laser beam provided from the deflector and irradiating the condensed laser beam to the substrate.

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