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    SHEARING INTERFEROMETER FOR LASER
    1.
    发明申请
    SHEARING INTERFEROMETER FOR LASER 审中-公开

    公开(公告)号：US20190154514A1

    公开(公告)日：2019-05-23

    申请号：US16154807

    申请日：2018-10-09

    Applicant: SAMSUNG DISPLAY CO., LTD.

    Inventor： Emil ASLANOV ,  Alexander VORONOV ,  Gyoo Wan HAN

    IPC: G01J9/02

    Abstract: A shearing interferometer includes first and second shearing plates disposed opposite to each other. The first shearing plate includes a first front surface and a first back surface, and splits an input beam input to the first front surface into first and second beams reflected at the first front and back surfaces, respectively. The second shearing plate includes a second front surface and a second back surface. The second shearing plate splits the first beam into third and fourth beams reflected at the second front and back surfaces, respectively, and splits the second beam into fifth and sixth beams reflected at the second front and back surfaces, respectively. Each of the first and second shearing plates has a thickness which limits a phase delay between the fourth beam and the fifth beam to a degree determined to allow interference to occur between the fourth beam and the fifth beam.

    F-THETA LENS AND LASER APPARATUS INCLUDING THE F-THETA LENS
    3.
    发明申请
    F-THETA LENS AND LASER APPARATUS INCLUDING THE F-THETA LENS 审中-公开

    公开(公告)号：US20190129188A1

    公开(公告)日：2019-05-02

    申请号：US16178372

    申请日：2018-11-01

    Applicant: Samsung Display Co., Ltd.

    Inventor： Emil ASLANOV ,  Jekil RYU ,  Yoongyeong BAE ,  Jooseob AHN ,  Gyoowan HAN

    IPC: G02B27/09 ,  G02B26/10 ,  B23K26/06

    Abstract: The laser apparatus includes a laser generator configured to generate at least one input beam traveling from one side to the other side in one direction and an optical system including an F-theta lens, which includes a plurality of spherical lenses. The F-theta lens includes a first lens including a first one surface that is convex toward the one side and a first other surface that is convex toward the other side, a second lens including a second one surface that is convex toward the one side and a second other surface that is concave toward the other side, a third lens including a third one surface that is concave toward the one side and a third other surface that is convex toward the other side, and a fourth lens including a fourth one surface that is convex toward the one side and a fourth other surface that is a plane perpendicular to the other side

    LASER PROCESSING APPARATUS
    4.
    发明申请
    LASER PROCESSING APPARATUS 有权

    公开(公告)号：US20210325639A1

    公开(公告)日：2021-10-21

    申请号：US17361560

    申请日：2021-06-29

    Applicant: Samsung Display Co., Ltd.

    Inventor： Emil ASLANOV ,  Je Kil RYU ,  Hae Sook LEE ,  Kyung Hoon CHUNG ,  Gyoo Wan HAN

    IPC: G02B13/00 ,  B23K26/06 ,  G02B26/10 ,  B23K26/082

    Abstract: A laser processing apparatus includes a laser source which generates a laser beam; a scanner unit disposed in an optical path of the laser beam from the laser source and which adjusts the optical path of the laser beam from the laser source in a first direction or in a second direction different from the first direction; and a reflector unit disposed in an optical path of the laser beam adjusted by the scanner unit and which reflects the laser beam adjusted by the scanner unit, where the reflector unit includes a first sub-reflector unit which shifts an optical path of the laser adjusted by the scanner unit in the first direction, and a second sub-reflector unit which shifts an optical path of the laser beam adjusted by the scanner unit in a third direction opposite to the first direction.

    LASER DEVICE
    6.
    发明申请
    LASER DEVICE 有权

    公开(公告)号：US20210364769A1

    公开(公告)日：2021-11-25

    申请号：US17239732

    申请日：2021-04-26

    Applicant: Samsung Display Co., Ltd.

    Inventor： Emil ASLANOV ,  JONGKI KIM ,  YOONGYEONG BAE ,  GYOOWAN HAN

    IPC: G02B19/00 ,  B23K26/06

    Abstract: A laser device includes a light source generating a laser beam, a stage, and a lens assembly disposed between the light source and the stage and irradiating the laser beam to a substrate disposed on the stage. The lens assembly includes a first lens assembly making divergent the laser beam provided from the light source, a deflector changing a path of the laser beam provided from the first lens assembly, and a second lens assembly condensing the laser beam provided from the deflector and irradiating the condensed laser beam to the substrate.

    LASER PROCESSING APPARATUS
    7.
    发明申请
    LASER PROCESSING APPARATUS 审中-公开

    公开(公告)号：US20180157006A1

    公开(公告)日：2018-06-07

    申请号：US15793698

    申请日：2017-10-25

    Applicant: Samsung Display Co. Ltd.

    Inventor： Emil ASLANOV ,  Je Kil RYU ,  Hae Sook LEE ,  Kyung Hoon CHUNG ,  Gyoo Wan HAN

    IPC: G02B13/00 ,  G02B26/10 ,  B23K26/06

    Abstract: A laser processing apparatus includes a laser source which generates a laser beam; a scanner unit disposed in an optical path of the laser beam from the laser source and which adjusts the optical path of the laser beam from the laser source in a first direction or in a second direction different from the first direction; and a reflector unit disposed in an optical path of the laser beam adjusted by the scanner unit and which reflects the laser beam adjusted by the scanner unit, where the reflector unit includes a first sub-reflector unit which shifts an optical path of the laser adjusted by the scanner unit in the first direction, and a second sub-reflector unit which shifts an optical path of the laser beam adjusted by the scanner unit in a third direction opposite to the first direction.

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