TEG CIRCUIT, SEMICONDUCTOR DEVICE, AND TEST METHOD OF THE TEG CIRCUIT

    公开(公告)号:US20240125841A1

    公开(公告)日:2024-04-18

    申请号:US18454404

    申请日:2023-08-23

    CPC classification number: G01R31/2607

    Abstract: An embodiment provides a test element group (TEG) circuit, including: a first pad configured for a test voltage to be applied; an amplifier including a first input terminal connected to the first pad, a second input terminal connected to a first terminal of a test transistor, and an output terminal electrically connected to the second input terminal; a variable resistor including one terminal connected to the output terminal of the amplifier and the other terminal connected to the first terminal of the test transistor; and a gate driving circuit that supplies a gate voltage to a gate of the test transistor.

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