公开(公告)号：US20240099161A1

公开(公告)日：2024-03-21

申请号：US18116681

申请日：2023-03-02

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jaehyeong Lee ,  Jinhyoun Kang ,  Jaeho Shin ,  Daeseok Han

IPC: H10N60/80 ,  H10N60/01 ,  H10N60/12

CPC classification number: H10N60/805 ,  H10N60/0912 ,  H10N60/12

Abstract: A Josephson junction device and a method of manufacturing the Josephson junction device are disclosed. The Josephson junction device includes a substrate having a top surface and a trench recessed below the first surface, wherein sidewalls of the substrate define sidewalls of the trench; a first superconducting electrode formed on the top surface of the substrate with sidewalls further defining the sidewalls of the trench; a tunneling thin film formed over the sidewalls of the substrate and over the sidewalls of the first superconducting electrode; and a second superconducting electrode formed in the trench in contact with the tunneling thin film and with top surface above the top surface of the substrate, wherein a superconducting tunnel junction is formed between the first superconducting electrode and the second superconducting electrode through the tunneling thin film.