公开(公告)号：US20250157686A1

公开(公告)日：2025-05-15

申请号：US18810735

申请日：2024-08-21

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Younseon WANG ,  Siyoung KOH ,  Bonseung GOO ,  Junho IM ,  Dongwan KIM ,  Minsung KIM ,  Jisoo IM

IPC: G21K1/06

Abstract: A reflector for generating neutral beams, the reflector includes a plurality of reflective plates Ion beams from an ion source collide against each of the plurality of reflective plates. The plurality of reflective plates reflect the ion beams and convert the ion beams into neutral beams. A coupling portion disposed between the plurality of reflective plates. Each of the plurality of reflective plates comprises a first surface, a second surface disposed on a first end of the first surface, and a third surface disposed on a second end of the first surface that is opposite to the first end.

公开(公告)号：US20250140509A1

公开(公告)日：2025-05-01

申请号：US18631735

申请日：2024-04-10

Applicant: Samsung Electronics Co., Ltd.

Inventor： Dongwan KIM ,  Minsung KIM ,  Youngseok SONG ,  Jisoo IM ,  Kanghee KIM ,  Younseon WANG ,  Junho IM

IPC: H01J37/02 ,  H01J37/305

Abstract: An ion neutralization module comprising a reflector configured to neutralize an ion, a frame configured to support the reflector, and a conductive adhesive between the reflector and the frame to attach the reflector to the frame.