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公开(公告)号:US10991825B2
公开(公告)日:2021-04-27
申请号:US16167815
申请日:2018-10-23
Applicant: Samsung Electronics Co., Ltd.
Inventor: Cheol Kim , Jong Chui Park , Kye Hyun Baek
IPC: H01L29/76 , H01L29/78 , H01L29/66 , H01L29/08 , H01L29/423 , H01L29/417 , H01L21/8238 , H01L27/092
Abstract: A semiconductor device includes a substrate having a plurality of fins protruding therefrom. The plurality of fins includes a plurality of active fins and at least one non-active fin disposed between ones of the plurality of active fins. The device also includes at least one gate electrode crossing at least a portion of the active fins. The device further includes a plurality of source/drain regions disposed on the active fins adjacent the at least one gate electrode and separated from one another by the at least one non-active fin.