公开(公告)号：US12255110B2

公开(公告)日：2025-03-18

申请号：US17341619

申请日：2021-06-08

Applicant: Samsung Electronics Co., Ltd.

Inventor： Gaurav Kumar ,  Lakshmi Narayana Pedapudi ,  Sameera Bharadwaja Hayavadana ,  Sathyanarayanan Kulasekaran ,  Shashank Shrikant Agashe ,  Wan Sung Park ,  Sung Ha Kim

IPC: H01L21/66 ,  G01B11/06 ,  G01N21/84 ,  G03F7/16 ,  G03F7/30 ,  G06T7/00 ,  H01L21/67 ,  H01L21/02

Abstract: Example embodiments may provide methods for determining a quality of a film in spin coating process. The methods may include capturing images of portions of the film using an imaging device while coating the film on a substrate using a spinner. The imaging device may include SPCs and lens and/or SLMs. The methods may also include determining whether a characteristic of the film matches to a standard based on the images of the portions of the film. The method may further include performing detecting that the quality of the film is optimal in response to determining that the characteristic of the film matches to the standard or detecting that the quality of the film is not optimal in response to determining that the characteristic of the film does not match to the standard.