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公开(公告)号:US20180226575A1
公开(公告)日:2018-08-09
申请号:US15943698
申请日:2018-04-02
Applicant: Samsung Electronics Co., Ltd.
Inventor: Juhyun KIM , Kiwoong KIM , Sechung OH , Woochang LIM
Abstract: A semiconductor device and a method of forming the semiconductor device are disclosed. The semiconductor device includes a lower electrode and a magnetic tunnel junction structure disposed on the lower electrode. The magnetic tunnel junction structure includes a seed pattern disposed on the lower electrode. The seed pattern includes an amorphous seed layer and an oxidized seed layer disposed on a surface of the amorphous seed layer. The seed pattern may prevent the lattice structure of the lower electrode from adversely affecting the lattice structure of a pinned magnetic layer of the magnetic tunnel junction structure.