公开(公告)号：US11262325B2

公开(公告)日：2022-03-01

申请号：US16611805

申请日：2018-05-04

Applicant: Sciosense B.V.

Inventor： Micha In't Zandt ,  Frederik Willem Maurits Vanhelmont ,  Nebojsa Nenadovic ,  Dimitri Soccol

IPC: G01N27/22

Abstract: A sensor semiconductor device comprises a transducer which comprises a capacitor with at least two electrodes. The transducer further comprises a polymer which is arranged between at least two electrodes of the capacitor, and a top surface of the transducer. The polymer is able to absorb water and the top surface is arranged such that it is exposed to the environment of the sensor semiconductor device. Furthermore, at least a part of the top surface is superhydrophobic and the sensor semiconductor device is capable of measuring the humidity of the environment of the sensor semiconductor device.