CMOS-compatible dew point sensor device and method of determining a dew point

    公开(公告)号:US11002696B2

    公开(公告)日:2021-05-11

    申请号:US16079080

    申请日:2017-02-21

    Applicant: Sciosense B.V.

    Abstract: In an embodiment a dew point sensor device includes a semiconductor substrate, a top layer arranged on the semiconductor substrate, a Peltier element integrated in the semiconductor substrate, a temperature sensor, a capacitor arranged at a surface of the top layer facing away from the semiconductor substrate, the temperature sensor and the capacitor being arranged so that a temperature of the capacitor is measurable by the temperature sensor, wherein the capacitor includes a plurality of capacitor elements each having a capacitance, and an electronic circuit configured for an individual determination of the capacitances and a generation of a set of binary digits, each of the binary digits corresponding to one of the capacitor elements and indicating whether the capacitance of the capacitor element is within a predefined range.

    CMOS compatible dew point sensor device and method of determining a dew point

    公开(公告)号:US11525793B2

    公开(公告)日:2022-12-13

    申请号:US17225670

    申请日:2021-04-08

    Applicant: Sciosense B.V.

    Abstract: In an embodiment a method includes determining, for each capacitor element of a plurality of capacitor elements of a capacitor, an increase of a capacitance of a capacitor element caused by a decrease of a temperature of the capacitor and deriving a dew point from a temperature at which the increases of the capacitances or values corresponding to the increases of the capacitances exceed a predefined limit by generating a set of binary digits, each of the binary digits corresponding to one of the capacitor elements and indicating whether the capacitance of the capacitor element is within a predefined range, comparing sets of binary digits generated at different temperatures and determining a number of capacitor elements for which the corresponding binary digits of the sets are different and repeating the comparison for a sequence of sets generated at decreasing temperatures.

    Sensor semiconductor device
    3.
    发明授权

    公开(公告)号:US11262325B2

    公开(公告)日:2022-03-01

    申请号:US16611805

    申请日:2018-05-04

    Applicant: Sciosense B.V.

    Abstract: A sensor semiconductor device comprises a transducer which comprises a capacitor with at least two electrodes. The transducer further comprises a polymer which is arranged between at least two electrodes of the capacitor, and a top surface of the transducer. The polymer is able to absorb water and the top surface is arranged such that it is exposed to the environment of the sensor semiconductor device. Furthermore, at least a part of the top surface is superhydrophobic and the sensor semiconductor device is capable of measuring the humidity of the environment of the sensor semiconductor device.

    CMOS Compatible Dew Point Sensor Device and Method of Determining a Dew Point

    公开(公告)号:US20210223193A1

    公开(公告)日:2021-07-22

    申请号:US17225670

    申请日:2021-04-08

    Applicant: Sciosense B.V.

    Abstract: In an embodiment a method includes determining, for each capacitor element of a plurality of capacitor elements of a capacitor, an increase of a capacitance of a capacitor element caused by a decrease of a temperature of the capacitor and deriving a dew point from a temperature at which the increases of the capacitances or values corresponding to the increases of the capacitances exceed a predefined limit by generating a set of binary digits, each of the binary digits corresponding to one of the capacitor elements and indicating whether the capacitance of the capacitor element is within a predefined range, comparing sets of binary digits generated at different temperatures and determining a number of capacitor elements for which the corresponding binary digits of the sets are different and repeating the comparison for a sequence of sets generated at decreasing temperatures.

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