公开(公告)号：US20210163282A1

公开(公告)日：2021-06-03

申请号：US17043397

申请日：2019-04-25

Applicant: Sciosense B.V.

Inventor： Olaf Wunnicke ,  Frederik Willem Maurits Vanhelmont ,  Willem Frederik Adrianus Besling ,  Remco Henricus Wilhelmus Pijnenburg ,  Casper Van Der Avoort ,  Anderson Pires Singulani ,  Martijn Goossens

IPC: B81B7/00 ,  G01L9/00 ,  G01L9/12

Abstract: In an embodiment a system includes a sensor including a base having a base electrode and a first membrane suspended above the base, wherein the first membrane has a first membrane electrode, wherein the first membrane is configured to deflect with respect to the base electrode in response to an environmental condition, and wherein the sensor is configured to measure a capacitance between the base electrode and the first membrane electrode. The system further includes a first device of the system configured to generate electrical interference signals, a first electrically conductive shield layer positioned between the sensor and the first device of the system, wherein the first electrically conductive shield layer defines a plurality of first apertures extending through the first electrically conductive shield layer and a dielectric material disposed in the plurality of first apertures.

公开(公告)号：US11427465B2

公开(公告)日：2022-08-30

申请号：US17043397

申请日：2019-04-25

Applicant: Sciosense B.V.

Inventor： Olaf Wunnicke ,  Frederik Willem Maurits Vanhelmont ,  Willem Frederik Adrianus Besling ,  Remco Henricus Wilhelmus Pijnenburg ,  Casper Van Der Avoort ,  Anderson Pires Singulani ,  Martijn Goossens

IPC: B81B7/00 ,  G01L9/00 ,  G01L9/12

Abstract: In an embodiment a system includes a sensor including a base having a base electrode and a first membrane suspended above the base, wherein the first membrane has a first membrane electrode, wherein the first membrane is configured to deflect with respect to the base electrode in response to an environmental condition, and wherein the sensor is configured to measure a capacitance between the base electrode and the first membrane electrode. The system further includes a first device of the system configured to generate electrical interference signals, a first electrically conductive shield layer positioned between the sensor and the first device of the system, wherein the first electrically conductive shield layer defines a plurality of first apertures extending through the first electrically conductive shield layer and a dielectric material disposed in the plurality of first apertures.

公开(公告)号：US11262325B2

公开(公告)日：2022-03-01

申请号：US16611805

申请日：2018-05-04

Applicant: Sciosense B.V.

Inventor： Micha In't Zandt ,  Frederik Willem Maurits Vanhelmont ,  Nebojsa Nenadovic ,  Dimitri Soccol

IPC: G01N27/22

Abstract: A sensor semiconductor device comprises a transducer which comprises a capacitor with at least two electrodes. The transducer further comprises a polymer which is arranged between at least two electrodes of the capacitor, and a top surface of the transducer. The polymer is able to absorb water and the top surface is arranged such that it is exposed to the environment of the sensor semiconductor device. Furthermore, at least a part of the top surface is superhydrophobic and the sensor semiconductor device is capable of measuring the humidity of the environment of the sensor semiconductor device.

公开(公告)号：US12158440B2

公开(公告)日：2024-12-03

申请号：US17433856

申请日：2020-02-26

Applicant: Sciosense B.V.

Inventor： Frederik Willem Maurits Vanhelmont ,  Nebojsa Nenadovic ,  Hilco Suy ,  Agata Sakic ,  Micha in't Zandt ,  Guido Stefanuto

IPC: G01N27/12 ,  G01N33/00

Abstract: A sensor device includes a first sensor including a heating element configured to heat up the first sensor in a controllable manner and a second sensor thermally coupled to the heating element of the first sensor such that the heating element is further configured to heat up the second sensor in a controllable manner.

公开(公告)号：US11774389B2

公开(公告)日：2023-10-03

申请号：US16976348

申请日：2019-02-28

Applicant: Sciosense B.V.

Inventor： Frederik Willem Maurits Vanhelmont ,  Nebojsa Nenadovic ,  Hilco Suy ,  Hooman Habibi

IPC: G01N27/22 ,  G01N27/12 ,  G01N33/00

CPC classification number: G01N27/223 ,  G01N27/121 ,  G01N33/0031

Abstract: A monolithic sensor arrangement, a manufacturing method and a measurement method are disclosed. In an embodiment a monolithic gas sensor arrangement includes a sensor including a first transducer with a first sensitive layer and a second transducer with a second sensitive layer, and a readout circuit configured to generate a first measurement signal and a second measurement signal depending on the first and second transducers, wherein the sensor arrangement is a humidity sensor arrangement, wherein the first and second sensitive layers are configured to absorb water molecules, and wherein the first and second sensitive layers differ from each other in at least one property.

公开(公告)号：US20220128502A1

公开(公告)日：2022-04-28

申请号：US17433856

申请日：2020-02-26

Applicant: Sciosense B.V.

Inventor： Frederik Willem Maurits Vanhelmont ,  Nebojsa Nenadovic ,  Hilco Suy ,  Agata Sakic ,  Micha in't Zandt ,  Guido Stefanuto

IPC: G01N27/12

Abstract: In an embodiment a sensor device include a first sensor including a heating element configured to heat up the first sensor in a controllable manner and a second sensor thermally coupled to the heating element of the first sensor such that the heating element is further configured to heat up the second sensor in a controllable manner.

公开(公告)号：US20210116406A1

公开(公告)日：2021-04-22

申请号：US16976348

申请日：2019-02-28

Applicant: Sciosense B.V.

Inventor： Frederik Willem Maurits Vanhelmont ,  Nebojsa Nenadovic ,  Hilco Suy ,  Hooman Habibi

IPC: G01N27/22 ,  G01N33/00 ,  G01N27/12

Abstract: A monolithic sensor arrangement, a manufacturing method and a measurement method are disclosed. In an embodiment a monolithic gas sensor arrangement includes a sensor including a first transducer with a first sensitive layer and a second transducer with a second sensitive layer, and a readout circuit configured to generate a first measurement signal and a second measurement signal depending on the first and second transducers, wherein the sensor arrangement is a humidity sensor arrangement, wherein the first and second sensitive layers are configured to absorb water molecules, and wherein the first and second sensitive layers differ from each other in at least one property.