公开(公告)号：US20150364691A1

公开(公告)日：2015-12-17

申请号：US14732830

申请日：2015-06-08

Applicant: South University of Science and Technology of China

Inventor： Fei Wang ,  Shaoda Zhang

IPC: H01L51/00 ,  H01L51/44

CPC classification number: H01L51/0048 ,  C01B32/168 ,  H01L27/305 ,  H01L51/4206

Abstract: A double-cantilever infrared detector based on single walled carbon nanotube and the manufacture method thereof are provided. The detector comprises: a substrate having a detection window extending through the substrate from the top surface to the bottom surface; two heterogeneous cantilevers, wherein each cantilever is located on the substrate and has a fixed end connected to the substrate and a free end suspended above the detection window; a single walled carbon nanotube film bridged between the two free ends of the two heterogeneous composite cantilevers, wherein the heterogeneous cantilevers include a first material layer and a second material layer located thereon, and the first material layer and the second material layer have different thermal expansion coefficients.

Abstract translation: 提供了一种基于单壁碳纳米管的双悬臂红外探测器及其制造方法。 所述检测器包括：具有从所述顶表面延伸到所述底表面的穿过所述基底的检测窗口的基底; 两个异质悬臂，其中每个悬臂位于基板上，并且具有连接到基板的固定端和悬挂在检测窗上方的自由端; 桥接在两个非均相复合悬臂的两个自由端之间的单壁碳纳米管膜，其中所述异质悬臂包括位于其上的第一材料层和第二材料层，并且所述第一材料层和所述第二材料层具有不同的热膨胀 系数。