公开(公告)号：US20160265916A1

公开(公告)日：2016-09-15

申请号：US15031572

申请日：2014-12-11

Applicant: TRONICS MICROSYSTEMS S.A.

Inventor： Christophe Kergueris ,  Luca Ribetto ,  Riccardo Signoretti

IPC: G01C19/5621

CPC classification number: G01C19/5621 ,  G01C19/5747

Abstract: A micromechanical sensor for measuring z-axis angular rate includes a substrate defining a substrate plane and a z-axis perpendicular to the substrate plane. A first vibratory structure has a first shuttle-mass and a first proof-mass coupled to the first shuttle-mass by a first sense-mode spring. There is a second vibratory structure in a mirror-symmetrical setup (excepting the electrodes). First and second suspension structures suspend the first and second shuttle-masses above the substrate flexibly in drive-mode direction. Both shuttle-masses are suspended above the substrate for movement at least in drive-mode direction, wherein drive-mode direction and sense-mode direction are parallel to the substrate plane. Both vibratory structures are elastically coupled to each other. The device has separate structural elements for defining at least one of the following: (1) the anti-phase frequency and the in-phase/anti-phase frequency separation of the drive-mode, (2) the anti-phase frequency and the in-phase/anti-phase frequency separation of the sense-mode.

Abstract translation: 用于测量z轴角速率的微机械传感器包括限定衬底平面和垂直于衬底平面的z轴的衬底。 第一振动结构具有通过第一感测模式弹簧耦合到第一穿梭体的第一穿梭质量和第一穿孔质量。 镜面对称设置中有第二个振动结构（电极除外）。 第一和第二悬架结构在驱动模式方向上柔性地悬挂在基板上方的第一和第二梭芯。 两个穿梭质量悬挂在衬底上方至少在驱动模式方向上移动，其中驱动模式方向和感测模式方向平行于衬底平面。 两个振动结构彼此弹性耦合。 该装置具有用于限定以下至少一个的单独的结构元件：（1）驱动模式的反相频率和同相/反相频率分离，（2）反相频率和 感应模式的同相/反相频率分离。