公开(公告)号：US20180100775A1

公开(公告)日：2018-04-12

申请号：US15839042

申请日：2017-12-12

Applicant: Seiko Epson Corporation

Inventor： Ryuta NISHIZAWA ,  Keiji NAKAGAWA ,  Keiichi YAMAGUCHI ,  Atsushi MATSUO ,  Fumio ICHIKAWA

IPC: G01L1/16 ,  G01L1/10 ,  G01C19/5607

CPC classification number: G01L1/162 ,  G01C19/5607 ,  G01C19/5614 ,  G01C19/5621 ,  G01L1/106 ,  H01L41/094

Abstract: A physical quantity detecting device includes a vibrating element and a charge amplifier. The vibrating element includes a first detection electrode, a second detection electrode, a third detection electrode, and a fourth detection electrode. The first and fourth detection electrodes have the same electrical polarity, the second and third detection electrodes have the same electrical polarity, and the first and second detection electrodes have opposite electrical polarities. The first and fourth detection electrodes are connected to the charge amplifier, and the second and third detection electrodes are connected to the charge amplifier.

公开(公告)号：US09534896B2

公开(公告)日：2017-01-03

申请号：US13851448

申请日：2013-03-27

Applicant: Honeywell International Inc.

Inventor： Michael S. Sutton ,  Mark W. Weber

IPC: G01C19/5621 ,  G01C19/5726 ,  G01C19/5614

CPC classification number: G01C19/5621 ,  G01C19/5614 ,  G01C19/5726

Abstract: Embodiments of the subject application provide a method for operating a micro-electro-mechanical system (MEMS) tuning fork gyroscope. The method includes oscillating a voltage on a first sense electrode out-of-plane from and proximate a first side of a first proof mass between a first voltage and a second voltage at a first frequency. The method also includes oscillating a voltage on a second sense electrode out-of-plane from and proximate a second side of the first proof mass between the first voltage and the second voltage at the first frequency and 180 degrees out-of-phase with the voltage on the first sense electrode. The method also includes generating a rate signal corresponding to a rotation rate of the first proof mass by first demodulating an out-of-plane signal from the first proof mass at the first frequency and second demodulating the out-of-plane signal in phase with in-plane motion of the first proof mass.

Abstract translation: 本申请的实施例提供了一种用于操作微机电系统（MEMS）音叉陀螺仪的方法。 该方法包括在第一频率处的第一电压和第二电压之间的第一感测电极外的第一感测电极的外部和附近的第一检测质量的第一侧振荡电压。 该方法还包括在第一频率处的第一电压和第二电压之间的第一感测质量的第二侧和第二感测电极的第二侧附近振荡第二感测电极的电压，并且与第 第一感测电极上的电压。 该方法还包括通过首先从第一频率处的第一检测质量解调出平面外信号，并且相位地解调平面外信号，生成与第一证明质量块的旋转速率相对应的速率信号， 第一个检验质量的平面内运动。

公开(公告)号：US20160320180A1

公开(公告)日：2016-11-03

申请号：US14721914

申请日：2015-05-26

Applicant: Honeywell International Inc.

Inventor： Grant H. Lodden ,  Robert D. Horning

IPC: G01B11/27 ,  G01P15/13 ,  G02B6/43 ,  G02B6/12 ,  G02B6/42

CPC classification number: G01B11/272 ,  B81B2201/0228 ,  B81B2201/04 ,  B81B2203/053 ,  G01C19/5621 ,  G01C19/5656 ,  G01C25/00 ,  G01P15/093 ,  G01P15/13 ,  G01P21/00 ,  G01P2015/0822 ,  G02B6/12 ,  G02B6/4295 ,  G02B6/43 ,  G02B2006/12138

Abstract: System and methods for highly integrated optical readout MEMS sensors are provided. In one embodiment, a method for an integrated waveguide optical-pickoff sensor comprises: launching a laser beam generated by a laser light source into an integrated waveguide optical-pickoff monolithically fabricated within a first substrate, the integrated waveguide optical-pickoff including an optical input port, a coupling port, and an optical output port; and detecting an amount of coupling of the laser beam from the coupling port to a sensor component separated from the coupling port by a gap by measuring an attenuation of the laser beam at the optical output port.

Abstract translation: 提供了高集成度光读出MEMS传感器的系统和方法。 在一个实施例中，一种用于集成波导光学传感器传感器的方法包括：将由激光光源产生的激光束发射到在第一衬底内单片制造的集成波导光学传感器中，所述集成波导光学传感器包括光输入 端口，耦合端口和光输出端口; 以及通过测量光输出端口处的激光束的衰减来检测激光束从耦合端口到与耦合端口分离的传感器部件之间的间隙的耦合量。

公开(公告)号：US09341643B2

公开(公告)日：2016-05-17

申请号：US13947468

申请日：2013-07-22

Applicant: Seiko Epson Corporation

Inventor： Keiichi Yamaguchi ,  Seiichiro Ogura ,  Takayuki Kikuchi ,  Ryuta Nishizawa ,  Seiji Osawa

IPC: G01C19/56 ,  G01C19/5621

CPC classification number: G01C19/5607 ,  G01C19/5621 ,  G01C19/5628 ,  G01P9/04 ,  Y10T29/49 ,  Y10T74/12

Abstract: A vibrator element includes a pair of first and second drive vibrating arms that extend in opposite directions from a base portion; a first weight that is spaced from a tip of at least one of the first and second drive vibrating arms toward the base portion and is provided in a first region of the at least one of the drive vibrating arms; and a second weight that is provided in a second region that is a region between a tip of the first weight and the tip of the at least one of the drive vibrating arms. When an area of the first region is represented as A1, a mass of the first weight is represented as B1, an area of the second region is represented as A2, and a mass of the second weight is represented as B2, B1/A1>B2/A2 is established.

Abstract translation: 振动元件包括从基部向相反方向延伸的一对第一和第二驱动振动臂; 所述第一重物与所述第一和第二驱动振动臂中的至少一个朝向所述基座部分的顶端间隔开并设置在所述至少一个所述驱动振动臂的第一区域中; 以及设置在作为所述第一配重的前端与所述至少一个所述驱动振动臂的前端之间的区域的第二区域中的第二配重。 当第一区域的区域表示为A1时，将第一重量的质量表示为B1，将第二区域的面积表示为A2，将第二重量的质量表示为B2，B1 / A1> B2 / A2建立。

公开(公告)号：US20160123734A1

公开(公告)日：2016-05-05

申请号：US14921786

申请日：2015-10-23

Applicant: Seiko Epson Corporation

Inventor： Keiji Nakagawa ,  Ryuta Nishizawa

IPC: G01C19/5621 ,  H01L41/08

CPC classification number: G01C19/5621 ,  G01C19/56

Abstract: A gyro element as a resonator element includes a drive resonating arm as a drive portion that is driven by application of a voltage, and a detection resonating arm as a detection portion in which charge is generated in response to a Coriolis force generated in the drive resonating arm. An amount of charge detected in the detection resonating arm in a state where the Coriolis force is not generated is greater than 0% and equal to or less than 0.1% of an amount of charge generated in the drive resonating arm when driving the drive resonating arm.

Abstract translation: 作为谐振器元件的陀螺元件包括作为通过施加电压驱动的驱动部分的驱动谐振臂和作为响应于在驱动谐振中产生的科里奥利力产生电荷的检测部分的检测谐振臂 臂。 在不产生科里奥利力的状态下在检测谐振臂中检测的电荷的量大于驱动驱动谐振臂时在驱动谐振臂中产生的电荷量的0％且等于或小于0.1％ 。

公开(公告)号：US09277869B2

公开(公告)日：2016-03-08

申请号：US14047649

申请日：2013-10-07

Applicant: TDK CORPORATION

Inventor： Katsuyuki Kurachi ,  Yasuhiro Aida ,  Hitoshi Sakuma ,  Kazuhiko Maejima

IPC: H01L41/187 ,  A61B5/024 ,  B41J2/14 ,  G01C19/5621 ,  G01L9/00 ,  G11B5/55 ,  H01L41/08 ,  H01L41/316

CPC classification number: A61B5/02444 ,  B41J2/14233 ,  B41J2202/03 ,  G01C19/5621 ,  G01L9/008 ,  G11B5/483 ,  G11B5/5552 ,  H01L41/0815 ,  H01L41/1873 ,  H01L41/316

Abstract: There are provided a thin-film piezoelectric element including a piezoelectric thin film which has an alkali niobate-based perovskite structure represented by the composition formula (K1-w-xNawSrx)m(Nb1-yZry)O3 and which is preferentially oriented to (001), and a pair of electrode films that sandwich the piezoelectric thin film, a thin-film piezoelectric actuator, and a thin-film piezoelectric sensor each including the thin-film piezoelectric element.

Abstract translation: 提供了一种薄膜压电元件，其包括具有由组成式（K1-w-xNawSrx）m（Nb1-yZry）O3表示的碱铌酸酯基钙钛矿结构的压电薄膜，其优先取向为（001 ）和夹着压电薄膜的一对电极膜，薄膜压电致动器和薄膜压电传感器，每个薄膜压电传感器都包括薄膜压电元件。

公开(公告)号：US09130147B2

公开(公告)日：2015-09-08

申请号：US13868472

申请日：2013-04-23

Applicant: Seiko Epson Corporation

Inventor： Ryuta Nishizawa ,  Keiji Nakagawa

IPC: G01C19/56 ,  H01L41/047 ,  G01C19/5621 ,  G01C19/5607

CPC classification number: H01L41/0475 ,  G01C19/56 ,  G01C19/5607 ,  G01C19/5621

Abstract: A vibrating reed includes a base part. A drive vibrating arm, a detection vibrating arm, and an adjustment vibrating arm extend from the base part. A first adjustment electrode and a second adjustment electrode are connected to the adjustment vibrating arm. The first adjustment electrode generates an electrical signal in first phase. The second adjustment electrode generates an electrical signal in second phase opposite to the first phase. The electrical signals of the adjustment electrodes are superimposed on the detection signal of the detection vibrating arm, and thereby, vibration leakage components are cancelled out. The adjustment vibrating arm is partially sandwiched between a first electrode piece and a second electrode piece, and the adjustment vibrating arm is partially sandwiched between a third electrode piece and a fourth electrode piece.

Abstract translation: 振动片包括基部。 驱动振动臂，检测振动臂和调节振动臂从基部延伸。 第一调整电极和第二调整电极连接到调节振动臂。 第一调整电极在第一相中产生电信号。 第二调整电极产生与第一相相反的第二相位的电信号。 调整电极的电信号叠加在检测振动臂的检测信号上，从而抵消振动泄漏成分。 调节振动臂部分地夹在第一电极片和第二电极片之间，并且调节振动臂部分地夹在第三电极片和第四电极片之间。

公开(公告)号：US09121707B2

公开(公告)日：2015-09-01

申请号：US13527077

申请日：2012-06-19

Applicant: Masashi Shimura ,  Takayuki Kikuchi

Inventor： Masashi Shimura ,  Takayuki Kikuchi

IPC: G01C19/00 ,  G01C19/5621

CPC classification number: G01C19/5621

Abstract: A bending vibration piece has a pair of drive vibration arms and a pair of detection vibration arms in an opposite direction thereto which are connected to a supporting part. The supporting part has recessed portions formed on both lateral parts in a direction of width, and a through-hole formed substantially at the center in a plane part of the supporting part and more toward the drive vibration arms than the recessed portions are. On a surface of the supporting part, drive electrode pads are arranged toward the drive vibration arms and detection electrode pads are arranged toward the detection vibration arms, with these electrode pads being separated from each other in a longitudinal direction by the recessed portions on both lateral part of the supporting part and the through-hole in the plane part.

Abstract translation: 弯曲振动片具有与支撑部连接的一对驱动振动臂和与其相反的方向的一对检测振动臂。 支撑部分沿宽度方向形成在两个横向部分上的凹陷部分，以及在支撑部分的平面部分中基本上形成在中心并且比凹部更靠近驱动振动臂的通孔。 在支撑部件的表面上，驱动电极焊盘被布置成朝向驱动振动臂，并且检测电极焊盘被布置成朝向检测振动臂，这些电极焊盘在纵向方向上被两个侧面上的凹部彼此分离 支撑部分的一部分和平面部分中的通孔。

公开(公告)号：US20150162522A1

公开(公告)日：2015-06-11

申请号：US14560402

申请日：2014-12-04

Applicant: Seiko Epson Corporation

Inventor： Seiichiro OGURA ,  Keiichi YAMAGUCHI ,  Ryuta NISHIZAWA ,  Takayuki KIKUCHI

IPC: H01L41/053 ,  H01L41/09

CPC classification number: G01C19/5621 ,  G01C19/5607

Abstract: A vibration element includes a vibrating portion, a support portion that supports the vibrating portion, and a suspension arm that couples the vibrating portion to the support portion. In addition, the suspension arm includes a meandering portion extending out the support portion and an inclination portion that couples the meandering portion to the vibrating portion.

Abstract translation: 振动元件包括振动部分，支撑振动部分的支撑部分和将振动部分连接到支撑部分的悬架臂。 此外，悬架臂包括延伸出支撑部的曲折部分和将曲折部分耦合到振动部分的倾斜部分。

公开(公告)号：US08973440B2

公开(公告)日：2015-03-10

申请号：US13404527

申请日：2012-02-24

Applicant: Takanobu Matsumoto ,  Akinori Yamada

Inventor： Takanobu Matsumoto ,  Akinori Yamada

IPC: G01C19/56 ,  H03H9/02 ,  H03H9/10 ,  H03H9/19

CPC classification number: H03H9/02 ,  G01C19/5621 ,  H03H9/02102 ,  H03H9/0552 ,  H03H9/10 ,  H03H9/1014 ,  H03H9/19 ,  H03H9/215 ,  H03H2003/0407

Abstract: A piezoelectric substrate includes vibrating arms, a base portion to which one end portion of each vibrating arm is connected, spindle portions formed in the other end portion of each vibrating arm, formed to have a large width, and having first groove portions formed therein, and second groove portions that are formed along the resonator center line of each vibrating arm, and flexure-torsional combined resonator is excited. A piezoelectric resonator element has flexural resonator of flexure-torsional combined resonator that is excited as its principal resonator and sets the cutting angle of the piezoelectric substrate, the widths and the depths of the first groove portion and the second groove portion, and the thickness of the vibrating arm such that the frequency-temperature characteristics represent third-order characteristics with respect to the temperature.

Abstract translation: 压电基板包括振动臂，每个振动臂的一个端部连接到的基部，形成为具有大的宽度的每个振动臂的另一端部的主轴部分，并且其中形成有第一凹槽部分， 以及沿着每个振动臂的谐振器中心线形成的第二凹槽部分，以及挠曲 - 扭转组合谐振器被激发。 压电谐振元件具有作为主谐振器激励的挠曲 - 扭转组合谐振器的弯曲共振器，并且设定压电基片的切割角度，第一凹槽部分和第二凹槽部分的宽度和深度以及第 振动臂使得频率 - 温度特性表示相对于温度的三次特性。