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公开(公告)号：US20110216469A1
公开(公告)日：2011-09-08
申请号：US13037762
申请日：2011-03-01
摘要： There is provided a method for fabricating a device, preferably for a micro electro electro mechanical system. The method includes forming a first electrode on a substrate, where the first electrode has a first sloped end at least at one end thereof; forming a sacrificial layer on the first electrode, where the sacrificial layer has a first sloped edge, the first sloped edge and the first sloped end are overlapped each other so that a thickness of the first sloped edge decreases as a thickness of the first sloped end increases; forming a first spacer on the first electrode, where the first spacer has contact with the first sloped edge; forming a beam electrode on the sacrificial layer and the first spacer; and removing the sacrificial layer after the forming the beam electrode.
摘要翻译： 提供了一种制造器件的方法，优选用于微机电系统。 该方法包括在基底上形成第一电极，其中第一电极至少在其一端具有第一倾斜端; 在所述第一电极上形成牺牲层，其中所述牺牲层具有第一倾斜边缘，所述第一倾斜边缘和所述第一倾斜端部彼此重叠，使得所述第一倾斜边缘的厚度随着所述第一倾斜端部的厚度而减小 增加 在所述第一电极上形成第一间隔物，其中所述第一间隔件与所述第一倾斜边缘接触; 在所述牺牲层和所述第一间隔物上形成束电极; 并且在形成束电极之后去除牺牲层。
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公开(公告)号：US08800141B2
公开(公告)日：2014-08-12
申请号：US13037762
申请日：2011-03-01
IPC分类号： H01G7/00
摘要： There is provided a method for fabricating a device, preferably for a micro electro electro mechanical system. The method includes forming a first electrode on a substrate, where the first electrode has a first sloped end at least at one end thereof; forming a sacrificial layer on the first electrode, where the sacrificial layer has a first sloped edge, the first sloped edge and the first sloped end are overlapped each other so that a thickness of the first sloped edge decreases as a thickness of the first sloped end increases; forming a first spacer on the first electrode, where the first spacer has contact with the first sloped edge; forming a beam electrode on the sacrificial layer and the first spacer; and removing the sacrificial layer after the forming the beam electrode.
摘要翻译： 提供了一种制造器件的方法，优选用于微机电系统。 该方法包括在基底上形成第一电极，其中第一电极至少在其一端具有第一倾斜端; 在所述第一电极上形成牺牲层，其中所述牺牲层具有第一倾斜边缘，所述第一倾斜边缘和所述第一倾斜端部彼此重叠，使得所述第一倾斜边缘的厚度随着所述第一倾斜端部的厚度而减小 增加 在所述第一电极上形成第一间隔物，其中所述第一间隔件与所述第一倾斜边缘接触; 在所述牺牲层和所述第一间隔物上形成束电极; 并且在形成束电极之后去除牺牲层。
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公开(公告)号：US08618715B2
公开(公告)日：2013-12-31
申请号：US13018696
申请日：2011-02-01
CPC分类号： B81C1/00698 , B81B2201/0221 , H01G5/18
摘要： A driving method for driving an electrostatic actuator including a fixed electrode and a movable electrode opposing each other with a dielectric layer interposed therebetween, includes applying a first voltage, between the fixed electrode and the movable electrode, to bring the movable electrode into contact with the dielectric layer, and applying a second voltage, between the fixed electrode and the movable electrode, after application of the first voltage is stopped and before the movable electrode moves away from the dielectric layer. Here, the second voltage has a polarity opposite to a polarity of the first voltage and an absolute value smaller than an absolute value of the first voltage.
摘要翻译： 一种用于驱动静电致动器的驱动方法，所述静电致动器包括固定电极和可动电极，所述固定电极和可动电极之间具有介电层彼此相对，包括在所述固定电极和所述可动电极之间施加第一电压以使所述可动电极与所述可动电极接触 并且在施加第一电压之后并且在可移动电极远离电介质层之前，在固定电极和可动电极之间施加第二电压。 这里，第二电压具有与第一电压的极性相反的极性和小于第一电压的绝对值的绝对值。
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公开(公告)号：US20110221300A1
公开(公告)日：2011-09-15
申请号：US13018696
申请日：2011-02-01
IPC分类号： H02N1/08
CPC分类号： B81C1/00698 , B81B2201/0221 , H01G5/18
摘要： A driving method for driving an electrostatic actuator including a fixed electrode and a movable electrode opposing each other with a dielectric layer interposed therebetween, includes applying a first voltage, between the fixed electrode and the movable electrode, to bring the movable electrode into contact with the dielectric layer, and applying a second voltage, between the fixed electrode and the movable electrode, after application of the first voltage is stopped and before the movable electrode moves away from the dielectric layer. Here, the second voltage has a polarity opposite to a polarity of the first voltage and an absolute value smaller than an absolute value of the first voltage.
摘要翻译： 一种用于驱动静电致动器的驱动方法，所述静电致动器包括固定电极和可动电极，所述固定电极和可动电极之间具有介电层彼此相对，包括在所述固定电极和所述可动电极之间施加第一电压以使所述可动电极与所述可动电极接触 并且在施加第一电压之后并且在可移动电极远离电介质层之前，在固定电极和可动电极之间施加第二电压。 这里，第二电压具有与第一电压的极性相反的极性和小于第一电压的绝对值的绝对值。
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5.发明授权Variable capacitive element, variable capacitive device, and method for driving the variable capacitive element 有权可变电容元件，可变电容器件和驱动可变电容元件的方法公开(公告)号：US08363381B2
公开(公告)日：2013-01-29
申请号：US12910267
申请日：2010-10-22
IPC分类号： H01G5/01
摘要： A variable capacitive element includes a first fixed electrode and a second fixed electrode that are insulated from each other, a movable electrode arranged to face the first fixed electrode and the second fixed electrode, a dielectric layer provided between the movable electrode and the first fixed electrode as well as the second fixed electrode, a first wiring part for applying a first driving voltage to the first fixed electrode with reference to a potential of the movable electrode, and a second wiring part for applying a second driving voltage to the second fixed electrode with reference to the potential of the movable electrode, the second driving voltage having a polarity different from a polarity of the first driving voltage.
摘要翻译： 可变电容元件包括彼此绝缘的第一固定电极和第二固定电极，布置成面对第一固定电极和第二固定电极的可动电极，设置在可动电极和第一固定电极之间的电介质层 以及第二固定电极，相对于可动电极的电位向第一固定电极施加第一驱动电压的第一配线部，以及用于向第二固定电极施加第二驱动电压的第二配线部， 参考可动电极的电位，第二驱动电压具有与第一驱动电压的极性不同的极性。
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6.发明申请VARIABLE CAPACITIVE ELEMENT, VARIABLE CAPACITIVE DEVICE, AND METHOD FOR DRIVING THE VARIABLE CAPACITIVE ELEMENT 有权可变电容元件，可变电容器件和驱动可变电容元件的方法公开(公告)号：US20110096462A1
公开(公告)日：2011-04-28
申请号：US12910267
申请日：2010-10-22
IPC分类号： H01G5/01
摘要： A variable capacitive element includes a first fixed electrode and a second fixed electrode that are insulated from each other, a movable electrode arranged to face the first fixed electrode and the second fixed electrode, a dielectric layer provided between the movable electrode and the first fixed electrode as well as the second fixed electrode, a first wiring part for applying a first driving voltage to the first fixed electrode with reference to a potential of the movable electrode, and a second wiring part for applying a second driving voltage to the second fixed electrode with reference to the potential of the movable electrode, the second driving voltage having a polarity different from a polarity of the first driving voltage.
摘要翻译： 可变电容元件包括彼此绝缘的第一固定电极和第二固定电极，布置成面对第一固定电极和第二固定电极的可动电极，设置在可动电极和第一固定电极之间的电介质层 以及第二固定电极，相对于可动电极的电位向第一固定电极施加第一驱动电压的第一配线部，以及用于向第二固定电极施加第二驱动电压的第二配线部， 参考可动电极的电位，第二驱动电压具有与第一驱动电压的极性不同的极性。
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7.发明授权公开(公告)号：US08665579B2
公开(公告)日：2014-03-04
申请号：US12366417
申请日：2009-02-05
申请人： Takeaki Shimanouchi , Masahiko Imai , Xiaoyu Mi , Satoshi Ueda
发明人： Takeaki Shimanouchi , Masahiko Imai , Xiaoyu Mi , Satoshi Ueda
IPC分类号： G01G5/00
CPC分类号： H01G5/16
摘要： There is proved a variable capacitor that includes a substrate, a signal line disposed on a surface of the substrate for feeding a signal, a ground electrode disposed on the surface, and a movable electrode opposed the signal line and the ground electrode, the movable electrode operable to move toward and away from the signal line and the ground electrode. The movable electrode can be displaced by an electrostatic attraction between the movable electrode and the signal line and between the movable electrode and the signal line. An amount of displacement of the movable electrode varies according to an amount of the voltage which generates the electrostatic attraction.
摘要翻译： 证明了可变电容器，其包括基板，设置在用于馈送信号的基板的表面上的信号线，设置在表面上的接地电极和与信号线和接地电极相对的可动电极，可动电极 可操作地朝着和远离信号线和接地电极移动。 可移动电极可以通过可动电极和信号线之间以及可移动电极和信号线之间的静电吸引而移位。 可移动电极的位移量根据产生静电吸引力的电压的量而变化。
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公开(公告)号：US20100246088A1
公开(公告)日：2010-09-30
申请号：US12662177
申请日：2010-04-05
申请人： Takeaki Shimanouchi , Masahiko Imai , Satoshi Ueda
发明人： Takeaki Shimanouchi , Masahiko Imai , Satoshi Ueda
摘要： A capacitor manufacturing method provides variable capacitors whose capacitances remain stable under the influence of temperature change. Such a variable capacitor includes a fixed electrode, a movable electrode film facing the fixed electrode, and an anchor portion that provides partial connection between the fixed electrode and the movable electrode film. For making this variable capacitor, a first electrode is formed to serve as the fixed electrode. Then, an anchor portion is formed on the fixed electrode, and a sacrifice film is formed to cover the fixed electrode but partially expose the anchor portion. A second electrode is formed on the sacrifice film to serve as the movable electrode film, bonded to the anchor portion. Finally, the sacrifice film is removed.
摘要翻译： 电容器制造方法提供了可变电容器，其电容在温度变化的影响下保持稳定。 这种可变电容器包括固定电极，与固定电极相对的可动电极膜，以及在固定电极和可动电极膜之间提供部分连接的锚固部分。 为了制造该可变电容器，形成第一电极用作固定电极。 然后，在固定电极上形成锚定部，并且形成牺牲膜以覆盖固定电极，但是部分地露出锚定部。 在牺牲膜上形成第二电极，作为可动电极膜，结合到锚定部。 最后，牺牲片被去除。
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公开(公告)号：US20100142117A1
公开(公告)日：2010-06-10
申请号：US12604935
申请日：2009-10-23
申请人： Takeaki Shimanouchi , Masahiko Imai , Satoshi Ueda
发明人： Takeaki Shimanouchi , Masahiko Imai , Satoshi Ueda
IPC分类号： H01G5/011
摘要： A variable capacitive element which includes a substrate; a signal line provided on the substrate; a movable electrode provided so as to cross over the signal line and having a first end and a second end which are fixed to the substrate; and a fixed capacitive portion provided between at least one of the both ends of the movable electrode and the substrate.
摘要翻译： 一种包括衬底的可变电容元件; 设置在基板上的信号线; 可移动电极，设置成跨过信号线并且具有固定到基板的第一端和第二端; 以及设置在可动电极和基板的两端中的至少一个之间的固定电容部。
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公开(公告)号：US20080239611A1
公开(公告)日：2008-10-02
申请号：US12071945
申请日：2008-02-28
申请人： Yu Yonezawa , Takeaki Shimanouchi , Naoyuki Mishima , Satoshi Ueda , Xiaoyu Mi , Masahiko Imai
发明人： Yu Yonezawa , Takeaki Shimanouchi , Naoyuki Mishima , Satoshi Ueda , Xiaoyu Mi , Masahiko Imai
IPC分类号： H01H47/00
CPC分类号： H01G5/16 , B81B7/008 , B81C99/003 , H01H2059/0018
摘要： In a method for drive controlling a micro machine device including two electrodes opposing each other and a dielectric layer sandwiched therebetween, a control voltage in a rectangular waveform in which positive and negative polarities are alternately inverted is applied between the two electrodes. A current passing through the micro machine device due to the application of the control voltage are detected with respect to positive and negative sides, and parameters related to a capacitance of the micro machine device are acquired with respect to the positive and negative sides on the basis of the detected current. The control voltage is controlled so that the parameters acquired with respect to the positive and negative sides accord with each other. Thus, variation of the capacitance between the positive side and the negative side can be suppressed in switching drive of a variable capacitance device.
摘要翻译： 在用于驱动控制包括彼此相对的两个电极和夹在其间的电介质层的微机器装置的方法中，在两个电极之间施加正负极性交替反转的矩形波形中的控制电压。 针对正侧和负侧检测由于施加控制电压而穿过微机器件的电流，并且基于正负侧获取与微机器件的电容相关的参数 的检测电流。 控制电压被控制，使得相对于正侧和负侧获取的参数彼此一致。 因此，可变电容器件的开关驱动可以抑制正侧和负极之间的电容的变化。
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