公开(公告)号：US07903386B2

公开(公告)日：2011-03-08

申请号：US12071945

申请日：2008-02-28

申请人： Yu Yonezawa ,  Takeaki Shimanouchi ,  Naoyuki Mishima ,  Satoshi Ueda ,  Xiaoyu Mi ,  Masahiko Imai

发明人： Yu Yonezawa ,  Takeaki Shimanouchi ,  Naoyuki Mishima ,  Satoshi Ueda ,  Xiaoyu Mi ,  Masahiko Imai

IPC分类号： H01G7/00 ,  H01G7/04 ,  H01G5/19

CPC分类号： H01G5/16 ,  B81B7/008 ,  B81C99/003 ,  H01H2059/0018

摘要： In a method for drive controlling a micro machine device including two electrodes opposing each other and a dielectric layer sandwiched therebetween, a control voltage in a rectangular waveform in which positive and negative polarities are alternately inverted is applied between the two electrodes. A current passing through the micro machine device due to the application of the control voltage are detected with respect to positive and negative sides, and parameters related to a capacitance of the micro machine device are acquired with respect to the positive and negative sides on the basis of the detected current. The control voltage is controlled so that the parameters acquired with respect to the positive and negative sides accord with each other. Thus, variation of the capacitance between the positive side and the negative side can be suppressed in switching drive of a variable capacitance device.

摘要翻译： 在用于驱动控制包括彼此相对的两个电极和夹在其间的电介质层的微机器装置的方法中，在两个电极之间施加正负极性交替反转的矩形波形中的控制电压。 针对正侧和负侧检测由于施加控制电压而穿过微机器件的电流，并且基于正负侧获取与微机器件的电容相关的参数 的检测电流。 控制电压被控制，使得相对于正侧和负侧获取的参数彼此一致。 因此，可变电容器件的开关驱动可以抑制正侧和负极之间的电容的变化。

公开(公告)号：US08031459B2

公开(公告)日：2011-10-04

申请号：US12071746

申请日：2008-02-26

申请人： Xiaoyu Mi ,  Takeaki Shimanouchi ,  Masahiko Imai ,  Satoshi Ueda

发明人： Xiaoyu Mi ,  Takeaki Shimanouchi ,  Masahiko Imai ,  Satoshi Ueda

IPC分类号： H01G5/01 ,  H01G5/04 ,  H01G7/00

CPC分类号： H01G5/16 ,  H01G5/011 ,  H01G5/06 ,  H03J3/20

摘要： A micro-device includes a movable part, a frame and a connecting part. The movable part has a main portion, a first capacitor electrode and a first driver electrode. The capacitor electrode and the driver electrode have electrode teeth extending from the main portion. The frame includes second capacitor and driver electrodes, where the second capacitor electrode has electrode teeth extending toward the first capacitor electrode, and the second driver electrode has electrode teeth extending toward the first driver electrode. The connecting part connects the movable part to the frame. The first and second capacitor electrodes have their electrode teeth overlapped in their initial position. The movable part is rotatable for varying the extent of the overlapping between the first and second driver electrodes.

摘要翻译： 微型装置包括可移动部件，框架和连接部件。 可动部具有主要部分，第一电容电极和第一驱动电极。 电容电极和驱动电极具有从主要部分延伸的电极齿。 该框架包括第二电容器和驱动电极，其中第二电容器电极具有朝着第一电容器电极延伸的电极齿，并且第二驱动电极具有朝向第一驱动电极延伸的电极齿。 连接部将可动部连接到框架。 第一和第二电容器电极的电极齿在其初始位置重叠。 可移动部分可旋转以改变第一和第二驱动器电极之间的重叠程度。

公开(公告)号：US07986507B2

公开(公告)日：2011-07-26

申请号：US12010367

申请日：2008-01-24

申请人： Takeaki Shimanouchi ,  Masahiko Imai ,  Yu Yonezawa ,  Xiaoyu Mi ,  Satoshi Ueda

发明人： Takeaki Shimanouchi ,  Masahiko Imai ,  Yu Yonezawa ,  Xiaoyu Mi ,  Satoshi Ueda

IPC分类号： H01G5/00

CPC分类号： H01G5/16 ,  H01G5/01 ,  H01G5/04 ,  H01G5/18

摘要： A variable capacitor is provided which is appropriate for suppressing fluctuation in driving voltage characteristic and for achieving a larger variation ratio of static capacitance. The variable capacitor includes a fixed electrode and a movable electrode. The fixed electrode includes a first opposing face, while the movable electrode includes a second opposing face that faces the first opposing face. The movable electrode further includes a curved portion that protrudes toward the fixed electrode. The variable capacitor also includes a dielectric pattern provided on the first opposing face.

摘要翻译： 提供一种可变电容器，其适于抑制驱动电压特性的波动并且实现较大的静态电容的变化率。 可变电容器包括固定电极和可动电极。 固定电极包括第一相对面，而可动电极包括面对第一相对面的第二相对面。 可动电极还包括向固定电极突出的弯曲部分。 可变电容器还包括设置在第一相对面上的电介质图案。

公开(公告)号：US20080218933A1

公开(公告)日：2008-09-11

申请号：US12071746

申请日：2008-02-26

申请人： Xiaoyu Mi ,  Takeaki Shimanouchi ,  Masahiko Imai ,  Satoshi Ueda

发明人： Xiaoyu Mi ,  Takeaki Shimanouchi ,  Masahiko Imai ,  Satoshi Ueda

IPC分类号： H01G5/011

CPC分类号： H01G5/16 ,  H01G5/011 ,  H01G5/06 ,  H03J3/20

摘要： A micro-device includes a movable part, a frame and a connecting part. The movable part has a main portion, a first capacitor electrode and a first driver electrode. The capacitor electrode and the driver electrode have electrode teeth extending from the main portion. The frame includes second capacitor and driver electrodes, where the second capacitor electrode has electrode teeth extending toward the first capacitor electrode, and the second driver electrode has electrode teeth extending toward the first driver electrode. The connecting part connects the movable part to the frame. The first and second capacitor electrodes have their electrode teeth overlapped in their initial position. The movable part is rotatable for varying the extent of the overlapping between the first and second driver electrodes.

摘要翻译： 微型装置包括可移动部件，框架和连接部件。 可动部具有主要部分，第一电容电极和第一驱动电极。 电容电极和驱动电极具有从主要部分延伸的电极齿。 该框架包括第二电容器和驱动电极，其中第二电容器电极具有朝着第一电容器电极延伸的电极齿，并且第二驱动电极具有朝向第一驱动电极延伸的电极齿。 连接部将可动部连接到框架。 第一和第二电容器电极的电极齿在其初始位置重叠。 可移动部分可旋转以改变第一和第二驱动器电极之间的重叠程度。

公开(公告)号：US08665579B2

公开(公告)日：2014-03-04

申请号：US12366417

申请日：2009-02-05

申请人： Takeaki Shimanouchi ,  Masahiko Imai ,  Xiaoyu Mi ,  Satoshi Ueda

发明人： Takeaki Shimanouchi ,  Masahiko Imai ,  Xiaoyu Mi ,  Satoshi Ueda

IPC分类号： G01G5/00

CPC分类号： H01G5/16

摘要： There is proved a variable capacitor that includes a substrate, a signal line disposed on a surface of the substrate for feeding a signal, a ground electrode disposed on the surface, and a movable electrode opposed the signal line and the ground electrode, the movable electrode operable to move toward and away from the signal line and the ground electrode. The movable electrode can be displaced by an electrostatic attraction between the movable electrode and the signal line and between the movable electrode and the signal line. An amount of displacement of the movable electrode varies according to an amount of the voltage which generates the electrostatic attraction.

摘要翻译： 证明了可变电容器，其包括基板，设置在用于馈送信号的基板的表面上的信号线，设置在表面上的接地电极和与信号线和接地电极相对的可动电极，可动电极 可操作地朝着和远离信号线和接地电极移动。 可移动电极可以通过可动电极和信号线之间以及可移动电极和信号线之间的静电吸引而移位。 可移动电极的位移量根据产生静电吸引力的电压的量而变化。

公开(公告)号：US20080239611A1

公开(公告)日：2008-10-02

申请号：US12071945

申请日：2008-02-28

申请人： Yu Yonezawa ,  Takeaki Shimanouchi ,  Naoyuki Mishima ,  Satoshi Ueda ,  Xiaoyu Mi ,  Masahiko Imai

发明人： Yu Yonezawa ,  Takeaki Shimanouchi ,  Naoyuki Mishima ,  Satoshi Ueda ,  Xiaoyu Mi ,  Masahiko Imai

IPC分类号： H01H47/00

CPC分类号： H01G5/16 ,  B81B7/008 ,  B81C99/003 ,  H01H2059/0018

摘要： In a method for drive controlling a micro machine device including two electrodes opposing each other and a dielectric layer sandwiched therebetween, a control voltage in a rectangular waveform in which positive and negative polarities are alternately inverted is applied between the two electrodes. A current passing through the micro machine device due to the application of the control voltage are detected with respect to positive and negative sides, and parameters related to a capacitance of the micro machine device are acquired with respect to the positive and negative sides on the basis of the detected current. The control voltage is controlled so that the parameters acquired with respect to the positive and negative sides accord with each other. Thus, variation of the capacitance between the positive side and the negative side can be suppressed in switching drive of a variable capacitance device.

摘要翻译： 在用于驱动控制包括彼此相对的两个电极和夹在其间的电介质层的微机器装置的方法中，在两个电极之间施加正负极性交替反转的矩形波形中的控制电压。 针对正侧和负侧检测由于施加控制电压而穿过微机器件的电流，并且基于正负侧获取与微机器件的电容相关的参数 的检测电流。 控制电压被控制，使得相对于正侧和负侧获取的参数彼此一致。 因此，可变电容器件的开关驱动可以抑制正侧和负极之间的电容的变化。

公开(公告)号：US20090207549A1

公开(公告)日：2009-08-20

申请号：US12366417

申请日：2009-02-05

申请人： Takeaki Shimanouchi ,  Masahiko Imai ,  Xiaoyu Mi ,  Satoshi Ueda

发明人： Takeaki Shimanouchi ,  Masahiko Imai ,  Xiaoyu Mi ,  Satoshi Ueda

IPC分类号： H01G7/06

CPC分类号： H01G5/16

摘要： There is proved a variable capacitor that includes a substrate, a signal line disposed on a surface of the substrate for feeding a signal, a ground electrode disposed on the surface, and a movable electrode opposed the signal line and the ground electrode, the movable electrode operable to move toward and away from the signal line and the ground electrode. The movable electrode can be displaced by an electrostatic attraction between the movable electrode and the signal line and between the movable electrode and the signal line. An amount of displacement of the movable electrode varies according to an amount of the voltage which generates the electrostatic attraction.

摘要翻译： 证明了可变电容器，其包括基板，设置在用于馈送信号的基板的表面上的信号线，设置在表面上的接地电极和与信号线和接地电极相对的可动电极，可动电极 可操作地朝着和远离信号线和接地电极移动。 可移动电极可以通过可动电极和信号线之间以及可移动电极和信号线之间的静电吸引而移位。 可移动电极的位移量根据产生静电吸引力的电压的量而变化。

公开(公告)号：US20080180876A1

公开(公告)日：2008-07-31

申请号：US12010367

申请日：2008-01-24

申请人： Takeaki Shimanouchi ,  Masahiko Imai ,  Yu Yonezawa ,  Xiaoyu Mi ,  Satoshi Ueda

发明人： Takeaki Shimanouchi ,  Masahiko Imai ,  Yu Yonezawa ,  Xiaoyu Mi ,  Satoshi Ueda

IPC分类号： H01G5/04

CPC分类号： H01G5/16 ,  H01G5/01 ,  H01G5/04 ,  H01G5/18

摘要： A variable capacitor is provided which is appropriate for suppressing fluctuation in driving voltage characteristic and for achieving a larger variation ratio of static capacitance. The variable capacitor includes a fixed electrode and a movable electrodetrode. The fixed electrode includes a first opposing face, while the movable electrode includes a second opposing face that faces the first opposing face. The movable electrode further includes a curved portion that protrudes toward the fixed electrode. The variable capacitor also includes a dielectric pattern provided on the first opposing face.

摘要翻译： 提供一种可变电容器，其适于抑制驱动电压特性的波动并且实现较大的静态电容的变化率。 可变电容器包括固定电极和可移动​​电极。 固定电极包括第一相对面，而可动电极包括面对第一相对面的第二相对面。 可动电极还包括向固定电极突出的弯曲部分。 可变电容器还包括设置在第一相对面上的电介质图案。

公开(公告)号：US07961448B2

公开(公告)日：2011-06-14

申请号：US12010243

申请日：2008-01-23

申请人： Naoyuki Mishima ,  Yu Yonezawa ,  Takeaki Shimanouchi ,  Xiaoyu Mi ,  Takeshi Takano ,  Nobuhisa Aoki ,  Yuuta Nakaya

发明人： Naoyuki Mishima ,  Yu Yonezawa ,  Takeaki Shimanouchi ,  Xiaoyu Mi ,  Takeshi Takano ,  Nobuhisa Aoki ,  Yuuta Nakaya

IPC分类号： H01H9/00

CPC分类号： H01G5/18 ,  H03H7/38 ,  H03H2007/006

摘要： A drive control method for a micro machine device is provided. The micro machine device is made up of first and second electrodes opposed to each other and a dielectric layer disposed between them. The drive control method includes the steps of applying a control voltage between the first and the second electrodes so that an electrostatic force is exerted on the first and the second electrodes for displacing the first or the second electrode, and switching polarity of the control voltage at a predetermined period or a shorter period.

摘要翻译： 提供了一种微机器的驱动控制方法。 微机器件由彼此相对的第一和第二电极以及设置在它们之间的电介质层构成。 驱动控制方法包括以下步骤：在第一和第二电极之间施加控制电压，使得静电力施加在第一和第二电极上，用于使第一或第二电极移位，并且将控制电压的极性切换到 预定期间或较短期间。

公开(公告)号：US20080180872A1

公开(公告)日：2008-07-31

申请号：US12010243

申请日：2008-01-23

申请人： Naoyuki Mishima ,  Yu Yonezawa ,  Takeaki Shimanouchi ,  Xiaoyu Mi ,  Takeshi Takano ,  Nobuhisa Aoki ,  Yuuta Nakaya

发明人： Naoyuki Mishima ,  Yu Yonezawa ,  Takeaki Shimanouchi ,  Xiaoyu Mi ,  Takeshi Takano ,  Nobuhisa Aoki ,  Yuuta Nakaya

IPC分类号： H01H47/00 ,  H03K17/975 ,  H03H7/38

CPC分类号： H01G5/18 ,  H03H7/38 ,  H03H2007/006

摘要： A drive control method for a micro machine device is provided. The micro machine device is made up of first and second electrodes opposed to each other and a dielectric layer disposed between them. The drive control method includes the steps of applying a control voltage between the first and the second electrodes so that an electrostatic force is exerted on the first and the second electrodes for displacing the first or the second electrode, and switching polarity of the control voltage at a predetermined period or a shorter period.

摘要翻译： 提供了一种微机器的驱动控制方法。 微机器件由彼此相对的第一和第二电极以及设置在它们之间的电介质层构成。 驱动控制方法包括以下步骤：在第一和第二电极之间施加控制电压，使得静电力施加在第一和第二电极上，用于使第一或第二电极移位，并且将控制电压的极性切换到 预定期间或较短期间。