公开(公告)号：US20210327045A1

公开(公告)日：2021-10-21

申请号：US17223349

申请日：2021-04-06

Applicant: Tokyo Electron Limited

Inventor： Tsuyoshi MORIYA ,  Yoshitaka ENOKI ,  Tokio TOYAMA ,  Michihiro TAKAHASHI ,  Takuya MORI

IPC: G06T7/00 ,  G06T11/00 ,  G06T7/70

Abstract: A contaminant detection system includes a light source configured to emit excitation light on an object to be inspected; a detector configured to detect fluorescence emitted from a contaminant adhering to the object to be inspected; and a processor. The fluorescence is caused by emission of the excitation light from the light source onto the object to be inspected. The processor is configured to perform a determination of a location of the contaminant and a type of the contaminant, based on the fluorescence emitted from the contaminant; and output a result of the determination.