公开(公告)号：US20160031056A1

公开(公告)日：2016-02-04

申请号：US14451406

申请日：2014-08-04

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Feng-Chi Chung ,  Ching-Hsing Hsieh ,  Chen-Hui Huang ,  Hsin-Kun Chu

IPC: B23Q15/28

CPC classification number: G05B19/41875 ,  G05B2219/32182 ,  G05B2219/45031 ,  Y02P90/22 ,  Y02P90/86

Abstract: A method of a fault detection and classification (FDC) may be used to determine outlier tools from a plurality of tools. The method includes generating a plurality of parameter charts, generating a plurality of group charts according to the plurality of parameter charts, generating a score table according to the plurality of group charts, determining outlier tools according to the score table, and performing tool correction on the outlier tools.

Abstract translation: 可以使用故障检测和分类（FDC）的方法来从多个工具确定异常工具。 该方法包括生成多个参数图，根据多个参数图生成多个组图，根据多个组图生成分数表，根据分数表确定异常值工具，并对 异常工具。