公开(公告)号：US20170098558A1

公开(公告)日：2017-04-06

申请号：US14935210

申请日：2015-11-06

Applicant: United Microelectronics Corp.

Inventor： Tzung-Wu Hou ,  Po-Lun Cheng ,  Meng-Che Yeh ,  Feng-Nan Chu

IPC: H01L21/67 ,  C09K13/04 ,  C09K13/08

CPC classification number: H01L21/67086 ,  H01L21/31111 ,  H01L21/67057 ,  H01L21/67075 ,  Y10T137/7287

Abstract: An acid replenishing system includes an acid tank, a draining apparatus, an acid replenishing apparatus, and a control unit. The acid tank contains a used acid solution. The draining apparatus drains an amount of the used acid solution from the acid tank. The acid replenishing apparatus replenishes an amount of a replenishing acid into the acid tank. The control unit controls the draining apparatus and the acid replenishing apparatus to perform a plurality of acid replenishing stages, so a total set amount of the replenishing acid to be added into the acid tank has been replenished.