公开(公告)号：US20190067415A1

公开(公告)日：2019-02-28

申请号：US15774286

申请日：2016-09-17

Applicant: University of Electronic Science and Technology of China

Inventor： Min REN ,  Yumeng ZHANG ,  Cong DI ,  Jingzhi XIONG ,  Zehong LI ,  Jinping ZHANG ,  Wei GAO ,  Bo ZHANG

IPC: H01L29/06 ,  H01L29/78 ,  H01L29/40

CPC classification number: H01L29/0615 ,  H01L29/0638 ,  H01L29/407 ,  H01L29/7811 ,  H01L29/7813 ,  H01L29/7823

Abstract: A junction termination with an internal field plate, the field plate structure and the junction termination extension region are folded inside the device to make full use of the thickness of the drift region in the body, thereby reducing the area of the termination and relieving the electric field concentration at the end of the PN junction. The breakdown position is transferred from the surface into the body of the original PN junction, and the withstand voltage of termination can reach to the breakdown voltage of the parallel plane junction. Under such design, a smaller area can be obtained than that of the conventional structure at the same withstand voltage.