公开(公告)号：US20220332571A1

公开(公告)日：2022-10-20

申请号：US17709932

申请日：2022-03-31

Applicant: XINTEC INC.

Inventor： Yu-Tang SHEN ,  Shun-Wen LONG ,  Chih-Hung CHO ,  Hsing-Yuan CHU

IPC: B81C99/00 ,  B32B43/00

Abstract: An operation method of a semiconductor removing apparatus includes moving a semiconductor structure to a stage, wherein the semiconductor structure includes a lower substrate, a cap, and a micro electro mechanical system (MEMS) structure between the lower substrate and the cap, and the cap has a diced portion; pulling, by a clamp assembly, a tape of a tape roll from a first side of the stage to a second side of the stage opposite to the first side, such that the tape is attached to the cap of the semiconductor structure; and pulling, by the clamp assembly, the tape of the tape roll from the second side of the stage back to the first side of the stage, such that the diced portion of the cap separates from the semiconductor structure.