公开(公告)号：US07149022B2

公开(公告)日：2006-12-12

申请号：US10872480

申请日：2004-06-22

申请人： Yong-kweun Mun ,  Ju-hyun Lee ,  Young-chul Ko ,  Jin-ho Lee

发明人： Yong-kweun Mun ,  Ju-hyun Lee ,  Young-chul Ko ,  Jin-ho Lee

IPC分类号： G02B26/08

CPC分类号： G02B26/0841

摘要： An optical scanner and a method of manufacturing the same are provided. The optical scanner comprises a rectangular frame, a H-shaped stage, which is linearly driven in a second direction perpendicular to a first direction of a central axis inside the frame and includes a central area positioned in a direction of the central axis and four extended areas that extend from both opposite sides of the central area parallel to the central axis, a cylindrical mirror, which is disposed on the central area and scans a laser beam incident on the surface thereof in the second direction, torsion bars, which are disposed on the central axis and support the stage by connecting the frame and the central area of the stage, and a stage driving structure, which includes driving comb electrodes formed at both long sides of the stage and fixed comb electrodes formed at corresponding sides of the frame, parallel to the first direction.

摘要翻译： 提供了一种光学扫描器及其制造方法。 光学扫描器包括矩形框架，H形台阶，其在垂直于框架内的中心轴线的第一方向的第二方向上线性地驱动，并且包括位于中心轴线的方向上的中心区域和四个延伸的 从平行于中心轴线的中心区域的相对侧延伸的区域，设置在中心区域上并沿着第二方向扫描入射在其表面上的激光束的圆柱形反射镜，扭矩杆设置在 中心轴并且通过连接框架和平台的中心区域来支撑平台，以及台架驱动结构，其包括形成在舞台的两个长边处的驱动梳电极和形成在框架的相应侧的固定梳电极， 平行于第一个方向。

公开(公告)号：US20070236767A1

公开(公告)日：2007-10-11

申请号：US11806946

申请日：2007-06-05

申请人： Young-chul Ko ,  Jin-ho Lee ,  Ju-hyun Lee ,  Yong-kweun Mun

发明人： Young-chul Ko ,  Jin-ho Lee ,  Ju-hyun Lee ,  Yong-kweun Mun

IPC分类号： G02B26/10

CPC分类号： G02B26/0841

摘要： Provided is a one-axis driving optical scanner which includes a substrate, a stage separated from the substrate to a predetermined height and having an upper surface where an optical scanning surface is formed, a torsion spring supporting the stage from middle portions of both edge sides of the stage, a support portion fixed to the substrate to support the torsion spring, a driving portion rotating the stage with respect to the torsion spring forming a center axis, and a flat panel type tuning electrode arranged in an area of the substrate corresponding to the stage.

公开(公告)号：US20050088720A1

公开(公告)日：2005-04-28

申请号：US10963693

申请日：2004-10-14

申请人： Young-chul Ko ,  Jin-ho Lee ,  Ju-hyun Lee ,  Yong-kweun Mun

发明人： Young-chul Ko ,  Jin-ho Lee ,  Ju-hyun Lee ,  Yong-kweun Mun

IPC分类号： G02B26/10 ,  B81B3/00 ,  G02B26/08 ,  G02B26/00 ,  H02N1/00

CPC分类号： G02B26/0841

摘要： Provided is a one-axis driving optical scanner which includes a substrate, a stage separated from the substrate to a predetermined height and having an upper surface where an optical scanning surface is formed, a torsion spring supporting the stage from middle portions of both edge sides of the stage, a support portion fixed to the substrate to support the torsion spring, a driving portion rotating the stage with respect to the torsion spring forming a center axis, and a flat panel type tuning electrode arranged in an area of the substrate corresponding to the stage.

摘要翻译： 提供了一种单轴驱动光学扫描器，其包括基板，从基板分离到预定高度并具有形成有光学扫描表面的上表面的台架，从两个边缘侧的中间部分支撑台阶的扭簧 固定到基板以支撑扭簧的支撑部分，相对于形成中心轴线的扭簧旋转台架的驱动部分和布置在基板对应的区域中的平板型调谐电极 舞台。

公开(公告)号：US07436574B2

公开(公告)日：2008-10-14

申请号：US11806946

申请日：2007-06-05

申请人： Young-chul Ko ,  Jin-ho Lee ,  Ju-hyun Lee ,  Yong-kweun Mun

发明人： Young-chul Ko ,  Jin-ho Lee ,  Ju-hyun Lee ,  Yong-kweun Mun

IPC分类号： G02B26/00 ,  G02B26/08

CPC分类号： G02B26/0841

摘要： Provided is a one-axis driving optical scanner which includes a substrate, a stage separated from the substrate to a predetermined height and having an upper surface where an optical scanning surface is formed, a torsion spring supporting the stage from middle portions of both edge sides of the stage, a support portion fixed to the substrate to support the torsion spring, a driving portion rotating the stage with respect to the torsion spring forming a center axis, and a flat panel type tuning electrode arranged in an area of the substrate corresponding to the stage.

摘要翻译： 提供了一种单轴驱动光学扫描器，其包括基板，从基板分离到预定高度并具有形成有光学扫描表面的上表面的台架，从两个边缘侧的中间部分支撑台阶的扭簧 固定到基板以支撑扭簧的支撑部分，相对于形成中心轴线的扭簧旋转台架的驱动部分和布置在基板对应的区域中的平板型调谐电极 舞台。

公开(公告)号：US07242511B2

公开(公告)日：2007-07-10

申请号：US10963693

申请日：2004-10-14

申请人： Young-chul Ko ,  Jin-ho Lee ,  Ju-hyun Lee ,  Yong-kweun Mun

发明人： Young-chul Ko ,  Jin-ho Lee ,  Ju-hyun Lee ,  Yong-kweun Mun

IPC分类号： G02B26/00 ,  G02B26/08

CPC分类号： G02B26/0841

摘要： Provided is a one-axis driving optical scanner which includes a substrate, a stage separated from the substrate to a predetermined height and having an upper surface where an optical scanning surface is formed, a torsion spring supporting the stage from middle portions of both edge sides of the stage, a support portion fixed to the substrate to support the torsion spring, a driving portion rotating the stage with respect to the torsion spring forming a center axis, and a flat panel type tuning electrode arranged in an area of the substrate corresponding to the stage.

摘要翻译： 提供了一种单轴驱动光学扫描器，其包括基板，从基板分离到预定高度并具有形成有光学扫描表面的上表面的台架，从两个边缘侧的中间部分支撑台阶的扭簧 固定到基板以支撑扭簧的支撑部分，相对于形成中心轴线的扭簧旋转台架的驱动部分和布置在基板对应的区域中的平板型调谐电极 舞台。

公开(公告)号：US20060176539A1

公开(公告)日：2006-08-10

申请号：US11346277

申请日：2006-02-03

申请人： Won-kyoung Choi ,  Yong-kweun Mun ,  Young-chul Ko

发明人： Won-kyoung Choi ,  Yong-kweun Mun ,  Young-chul Ko

IPC分类号： G02B26/08

CPC分类号： B81B7/0067 ,  B81B2201/047 ,  B81B2203/0384 ,  G02B26/0841

摘要： Provided are a chip-scale optical scanner package with reduced noise, and a method of manufacturing the optical scanner package. The optical scanner package includes: an optical scanner device scanning an incident beam, the optical scanner device including a mirror portion, comb-electrode structures rotating the mirror portion, and a base substrate; and a cover glass protecting the mirror portion, the cover glass including support portions sealingly adhered to a top surface of the base substrate around the mirror portion and a transmission portion with first and second transmission surfaces formed on the support portions and sloped with respect to a top surface of the base substrate. Accordingly, the optical scanner package can be miniaturized, can be simply processed, and reduce packaging costs. Further, the brightness and contrast of an image can be enhanced, and background noise can be reduced by reducing a sub reflected beam that causes noise.

摘要翻译： 提供了具有降低的噪声的芯片级光学扫描器封装以及制造光学扫描器封装的方法。 所述光学扫描器包括：扫描入射光束的光学扫描器装置，所述光学扫描器装置包括镜部分，旋转镜部分的梳状电极结构和基底; 以及保护镜部的保护玻璃，所述护罩玻璃包括密封地粘附到所述镜部分周围的所述基底基板的顶表面上的支撑部分和具有形成在所述支撑部分上并相对于所述镜部分倾斜的第一和第二透射表面的透射部分 基底的顶面。 因此，光学扫描器封装可以被小型化，可以被简单地处理，并且降低了封装成本。 此外，可以增强图像的亮度和对比度，并且可以通过减少引起噪声的子反射光束来降低背景噪声。

公开(公告)号：US20060098261A1

公开(公告)日：2006-05-11

申请号：US11209787

申请日：2005-08-24

申请人： Young-chul Ko ,  Yong-kweun Mun ,  Won-kyoung Choi

发明人： Young-chul Ko ,  Yong-kweun Mun ,  Won-kyoung Choi

IPC分类号： G02B26/08

CPC分类号： G02B26/0841

摘要： Provided is an optical scanner capable of hermetic sealing with a round of flip-chip bonding. The optical scanner includes an upper substrate and a lower substrate, a mirror suspended between the upper substrate and the lower substrate to seesaw, a plurality of movable comb electrodes vertically formed at predetermined intervals at both sides of the mirror, a plurality of upper static comb electrodes and lower static comb electrodes respectively vertically installed on the upper substrate and the lower substrate to alternate with the plurality of movable comb electrodes, a plurality of electrode structures respectively transmitting external voltage to the upper and lower static comb electrodes and the movable comb electrodes, and an upper outer frame and a lower outer frame respectively formed along edges of the upper and lower substrates and bonded to each other to seal the mirror from the outside.

摘要翻译： 提供了能够通过一轮倒装芯片接合进行气密密封的光学扫描仪。 光学扫描器包括上基板和下基板，悬挂在上基板和下基板之间的反射镜到跷跷板;多个可移动梳电极，其以预定间隔垂直地形成在反射镜的两侧;多个上静电梳 电极和下部静电梳电极分别垂直安装在上基板和下基板上以与多个可移动梳状电极交替;多个电极结构，分别将外部电压传输到上下静电梳电极和可移动​​梳电极， 以及分别沿着所述上基板和所述下基板的边缘形成并且彼此结合以将所述反射镜与外部密封的上外框架和下外框架。

公开(公告)号：US07149023B2

公开(公告)日：2006-12-12

申请号：US11209787

申请日：2005-08-24

申请人： Young-chul Ko ,  Yong-kweun Mun ,  Won-kyoung Choi

发明人： Young-chul Ko ,  Yong-kweun Mun ,  Won-kyoung Choi

IPC分类号： G02B26/08

CPC分类号： G02B26/0841

摘要： Provided is an optical scanner capable of hermetic sealing with a round of flip-chip bonding. The optical scanner includes an upper substrate and a lower substrate, a mirror suspended between the upper substrate and the lower substrate to seesaw, a plurality of movable comb electrodes vertically formed at predetermined intervals at both sides of the mirror, a plurality of upper static comb electrodes and lower static comb electrodes respectively vertically installed on the upper substrate and the lower substrate to alternate with the plurality of movable comb electrodes, a plurality of electrode structures respectively transmitting external voltage to the upper and lower static comb electrodes and the movable comb electrodes, and an upper outer frame and a lower outer frame respectively formed along edges of the upper and lower substrates and bonded to each other to seal the mirror from the outside.

公开(公告)号：US20060268383A1

公开(公告)日：2006-11-30

申请号：US11387958

申请日：2006-03-24

申请人： Jin-woo Cho ,  Young-chul Ko ,  Jin-ho Lee ,  Hyun-ku Jeong

发明人： Jin-woo Cho ,  Young-chul Ko ,  Jin-ho Lee ,  Hyun-ku Jeong

IPC分类号： G02B26/08 ,  G02B26/00 ,  H02N1/00

CPC分类号： G02B26/0841 ,  H02N1/008

摘要： Optical scanners having a multi-layered comb electrode structure and methods to increase driving force and angle are provided. The optical scanner includes: a stage which performs a seesaw motion in a first direction; a support unit which supports the seesaw motion of the stage; and a stage driving unit including driving comb electrodes extending outward from opposite sides of the stage in the first direction and fixed comb electrodes extending from the support unit facing the driving comb electrodes such that the driving comb electrodes and the fixed comb electrodes alternate with each other. Each of the stage, the support unit, and the stage driving unit is made of a plurality of conductive layers and insulation layers between the conductive layers.

摘要翻译： 提供具有多层梳状电极结构的光学扫描器和增加驱动力和角度的方法。 光学扫描器包括：在第一方向上执行跷跷板运动的平台; 支撑台架的跷跷板运动的支撑单元; 以及舞台驱动单元，其包括从第一方向的舞台的相对侧向外延伸的驱动梳状电极和从支撑单元向着驱动梳状电极延伸的固定梳状电极，使得驱动梳状电极和固定梳状电极彼此交替 。 舞台，支撑单元和舞台驱动单元中的每一个由导电层之间的多个导电层和绝缘层制成。

公开(公告)号：US20070108548A1

公开(公告)日：2007-05-17

申请号：US11652694

申请日：2007-01-12

申请人： Jin-ho Lee ,  Young-chul Ko

发明人： Jin-ho Lee ,  Young-chul Ko

IPC分类号： H01L29/00

CPC分类号： G02B26/0841

摘要： An optical scanner and a fabricating method thereof are provided. The optical scanner includes a base substrate, a frame, a H-shaped stage, supporters, and a stage driving structure. An interconnection layer having a predetermined pattern is formed on the base substrate. The frame has a rectangular frame shape which is formed on the base substrate. The H-shaped stage has a central area that performs a seesaw motion in the frame with respect to a uniaxial central axis and is positioned on the uniaxial central axis, and four extended areas that extend from two sides of the central area through which the uniaxial central axis passes, parallel the uniaxial central axis. The supporters have support beams that are positioned on the uniaxial central axis and connected to the frame and torsion bars that extend from the support beams and are connected to the central area of the stage. The stage driving structure has moving comb electrodes and fixed comb electrodes beneath the stage and on the base substrate facing the stage, respectively. A plurality of comb electrodes can be formed on the extended areas. Thus, a driving force can greatly be increased, which results in obtaining a similar driving speed using a considerably low voltage. Also, the weight of the stage should greatly be reduced for high-speed driving. For this, the stage is diced into a plurality of stages. Further, to increase the driving force, a plurality of comb electrodes are additionally formed on right and left sides of the stage.