Structure for controlling flashover in MEMS devices

    公开(公告)号:US09969611B1

    公开(公告)日:2018-05-15

    申请号:US15829325

    申请日:2017-12-01

    摘要: An improved microelectromechanical device includes an upper plate, a lower plate, and a spacing structure. The upper plate includes a first surface and an opposite second surface. The lower plate is spaced from the upper plate. The lower plate includes a third surface that faces the first surface of the upper plate and a fourth surface that is opposite of the third surface. The lower plate also includes a series of structures disposed with the third surface of the lower plate. The spacing structure is coupled to the upper and lower plate. The spacing structure includes a base portion that is sealed to the first surface of the upper plate and the third surface of the lower plate. The spacing structure further includes a protrusion that extends from the base portion between the upper and lower plates.

    FUNCTIONAL FILM
    3.
    发明申请
    FUNCTIONAL FILM 审中-公开

    公开(公告)号:US20180123085A1

    公开(公告)日:2018-05-03

    申请号:US15848997

    申请日:2017-12-20

    摘要: The present invention provides a functional film having an optical functional layer that exhibits an optical function and is capable of suppressing deterioration of the optical functional layer, and a method thereof. The functional film includes an optical functional layer, a resin layer which surrounds end surfaces of the optical functional layer, and gas barrier supports between which the optical functional layer and the resin layer are sandwiched, in which an oxygen permeability of the resin layer is 10 cc/(m2·day·atm) or less, and a difference between a thickness of the optical functional layer and the resin layer is within 30%; and a production method including forming a frame-shaped resin layer on a surface of a first gas barrier support, filling the inside of the frame with a polymerizable composition which becomes an optical functional layer, laminating a second gas barrier support on the resin layer, and curing the polymerizable composition.

    MULTIPLE MEMS DEVICE AND METHODS
    6.
    发明申请

    公开(公告)号:US20170248628A1

    公开(公告)日:2017-08-31

    申请号:US15444162

    申请日:2017-02-27

    申请人: mCube, Inc.

    IPC分类号: G01P15/08 B81B7/00

    摘要: A method for operating an electronic device comprising a first and second MEMS device and a semiconductor substrate disposed upon a mounting substrate includes subjecting the first MEMS device and the second MEMS device to physical perturbations, wherein the physical perturbations comprise first physical perturbations associated with the first MEMS device and second physical perturbations associated with the second MEMS device, wherein the first physical perturbations and the second physical perturbations are substantially contemporaneous, determining in a plurality of CMOS circuitry formed within the one or more semiconductor substrates, first physical perturbation data from the first MEMS device in response to the first physical perturbations and second physical perturbation data from the second MEMS device in response to the second physical perturbations, determining output data in response to the first physical perturbation data and to the second physical perturbation data, and outputting the output data.

    Multi-state interferometric modulator with large stable range of motion
    10.
    发明授权
    Multi-state interferometric modulator with large stable range of motion 有权
    具有稳定运动范围的多状态干涉式调制器

    公开(公告)号:US09372338B2

    公开(公告)日:2016-06-21

    申请号:US14265193

    申请日:2014-04-29

    摘要: This disclosure provides systems, methods and apparatus relating to electromechanical display devices. In one aspect, a multi-stage interferometric modulator (IMOD) can include a movable reflector that can be moved to different positions to produce different reflected colors. The IMOD can include deformable elements that are coupled to a back side of the movable reflector and provide support to the movable reflector. The deformable elements can provide a restoring force that biases the movable reflector to a resting position. The IMOD can include one or more restoring force modifiers that are configured to increase the restoring force when engaged. The restoring force modifiers can be between the movable reflector and the deformable elements such that the deformable elements contact the restoring force modifiers when the movable reflector is displaced to a contacting position.

    摘要翻译: 本公开提供了与机电显示装置有关的系统,方法和装置。 一方面,多级干涉式调制器(IMOD)可以包括可移动的反射器,其可移动到不同的位置以产生不同的反射颜色。 IMOD可以包括耦合到可移动反射器的后侧的可变形元件并且为可移动反射器提供支撑。 可变形元件可以提供将可移动反射器偏置到静止位置的恢复力。 IMOD可以包括一个或多个恢复力修改器,其被配置为当接合时增加恢复力。 恢复力修改器可以在可移动反射器和可变形元件之间,使得当可移动反射器移位到接触位置时,可变形元件接触恢复力修改器。