公开(公告)号：US20230359049A1

公开(公告)日：2023-11-09

申请号：US17993362

申请日：2022-11-23

Applicant: ZHENGZHOU UNIVERSITY OF LIGHT INDUSTRY

Inventor： Guoyong YE ,  Yalin Zhang ,  Tao Yuan ,  Shaobo Jin ,  Tong Wang ,  Xuling Liu ,  Hui Wang

IPC: G02B27/09 ,  G01B11/02 ,  G02B27/10

CPC classification number: G02B27/0938 ,  G01B11/02 ,  G02B27/0916 ,  G02B27/1026

Abstract: A vortex beam-excited precision grating displacement measurement apparatus, which performs displacement measurement by taking a vortex beam carrying topological charges as an excitation light source of a grating and by using the interference of a ±m-order diffracted vortex beam. In the vortex beam-excited precision grating displacement measurement method and apparatus, the displacement p/m of the measured displacement corresponds to the rotation of a circle 2π rad of an interference petal pattern, and then the rotation of 1° of the interference petal pattern corresponds to the measured displacement amount of p/360m. Compared with a conventional grating measurement method, the present disclosure provides a grating interference sensing signal that realizes a higher optical subdivision rate itself.

公开(公告)号：US11874475B2

公开(公告)日：2024-01-16

申请号：US17993362

申请日：2022-11-23

Applicant: ZHENGZHOU UNIVERSITY OF LIGHT INDUSTRY

Inventor： Guoyong Ye ,  Yalin Zhang ,  Tao Yuan ,  Shaobo Jin ,  Tong Wang ,  Xuling Liu ,  Hui Wang

IPC: G02B27/09 ,  G02B27/10 ,  G01B11/02

CPC classification number: G02B27/0938 ,  G01B11/02 ,  G02B27/0916 ,  G02B27/1026

Abstract: A vortex beam-excited precision grating displacement measurement apparatus, which performs displacement measurement by taking a vortex beam carrying topological charges as an excitation light source of a grating and by using the interference of a ±m-order diffracted vortex beam. In the vortex beam-excited precision grating displacement measurement method and apparatus, the displacement p/m of the measured displacement corresponds to the rotation of a circle 2π rad of an interference petal pattern, and then the rotation of 1° of the interference petal pattern corresponds to the measured displacement amount of p/360m. Compared with a conventional grating measurement method, the present disclosure provides a grating interference sensing signal that realizes a higher optical subdivision rate itself.