OPTICAL DEVICE, SPECTROSCOPIC DEVICE, AND SPECTROSCOPIC METHOD

    公开(公告)号:US20240319082A1

    公开(公告)日:2024-09-26

    申请号:US18611916

    申请日:2024-03-21

    Inventor: Kohei YAMADA

    CPC classification number: G01N21/31 G01B11/02 G01N2201/06113 G01N2201/0636

    Abstract: An optical device includes: an analysis optical system; and a length measurement optical system. The analysis optical system includes a moving mirror configured to reflect analysis light to add a first modulation signal to the analysis light, a gas cell with a gas that absorbs light of a predetermined wavelength sealed therein and configured to add a light absorption signal to the analysis light, and a first light receiving element configured to receive the analysis light including a sample-derived signal, the first modulation signal, and the light absorption signal. The length measurement optical system includes a second light source and obtains a displacement signal corresponding to a position of the moving mirror using laser light.

    Integrated measurement system
    8.
    发明授权

    公开(公告)号:US11994374B2

    公开(公告)日:2024-05-28

    申请号:US17309318

    申请日:2019-11-17

    Applicant: NOVA LTD.

    Abstract: A measurement system is presented configured for integration with a processing equipment for applying optical measurements to a structure. The measurement system comprises: a support assembly for holding a structure under measurements in a measurement plane, configured and operable for rotation in a plane parallel to the measurement plane and for movement along a first lateral axis in said measurement plane; an optical system defining illumination and collection light channels of normal and oblique optical schemes and comprising an optical head comprising at least three lens units located in the illumination and collection channels; a holder assembly comprising: a support unit for carrying the optical head, and a guiding unit for guiding a sliding movement of the support unit along a path extending along a second lateral axis perpendicular to said first lateral axis; and an optical window arrangement comprising at least three optical windows made in a faceplate located between the optical head at a certain distance from the measurement plane. The optical windows are aligned with the illumination and collection channels for, respectively, propagation of illuminating light from the optical head and propagation of light returned from an illuminated region to the optical head, in accordance with the normal and oblique optical schemes.

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